Abstract
The IC industry has improved process yield and device reliability considerably over the last few years. Much of the improvement is the result of continuing reduction in the defect density on IC wafers, a result made possible in part through the use of suitable defect detection and wafer inspection systems. These systems, however, are useful only for surface or visible defects.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
A. Rosencwaig, J. Opsal and D.L. Willenborg, Appl. Phys. Lett. 43, 166 (1983).
A. Rosencwaig, J. Opsal, W.L. Smith and D.L. Willenborg, Appl. Phys. Lett. 46 1013 (1985).
J. Opsal and A. Rosencwaig, Appl. Phys. Lett. 47, 498 (1985).
W.L. Smith, A. Rosencwaig and D.L. Willenborg, Appl. Phys. Lett. 47, 584 (1985).
B. Witowski, W.L. Smith and D.L. Willenborg, Appl. Phys. Lett. 52, 640 (1988).
F.G. Yost, D.E. Amos and A.D. Romig, Jr., Proc. IRPS 1989, p.143, ( IEEE, New York, NY 1989 ).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1990 Springer Science+Business Media New York
About this chapter
Cite this chapter
Smith, W.L., Welles, C.G., Rosencwaig, A. (1990). Thermal Wave Imaging of Nonvisible Defects in IC Devices. In: Thompson, D.O., Chimenti, D.E. (eds) Review of Progress in Quantitative Nondestructive Evaluation. Review of Progress in Quantitative Nondestructive Evaluation. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5772-8_138
Download citation
DOI: https://doi.org/10.1007/978-1-4684-5772-8_138
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-5774-2
Online ISBN: 978-1-4684-5772-8
eBook Packages: Springer Book Archive