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AC Photovoltaic Detection of Buried Structures of Semiconductor Wafers

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Review of Progress in Quantitative Nondestructive Evaluation

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Abstract

AC photovoltage (PV) and surface photovoltage (SPV) measurements, as nondestructive methods, have been used successfully to monitor the change of electronic properties induced by the latent scratches, polishing and other processing in semiconductor materials and devices [1–3].

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Author information

Authors and Affiliations

  1. Institute of Acoustics and Laboratory of Modern Acoustics, Nanjing University, Nanjing, 210093, China

    Zhong-ling Qian & Shu-yi Zhang

Authors
  1. Zhong-ling Qian
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  2. Shu-yi Zhang
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Editor information

Editors and Affiliations

  1. Center for NDE, Ames Laboratory (USDOE) and Department of Aerospace Engineering and Engineering Mechanics, Iowa State University, Ames, Iowa, USA

    Donald O. Thompson

  2. Center for NDE and Department of Aerospace Engineering and Engineering Mechanics, Iowa State University, Ames, Iowa, USA

    Dale E. Chimenti

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© 1995 Plenum Press, New York

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Qian, Zl., Zhang, Sy. (1995). AC Photovoltaic Detection of Buried Structures of Semiconductor Wafers. In: Thompson, D.O., Chimenti, D.E. (eds) Review of Progress in Quantitative Nondestructive Evaluation. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-1987-4_304

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  • DOI: https://doi.org/10.1007/978-1-4615-1987-4_304

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-5819-0

  • Online ISBN: 978-1-4615-1987-4

  • eBook Packages: Springer Book Archive

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