Skip to main content

Plasma and VUV Pretreatments of Polymer Surfaces for Adhesion Enhancement of Electrolessly Deposited Ni or Cu Films

  • Chapter
Metallization of Polymers 2

Abstract

Metallized polymer or polymer-based materials are used in a large range of electronics applications including the fabrication of ohmic contacts, chip-level interconnects, printed circuit boards and shielded materials.1–7 For such technological applications, electroless deposition is the most widely used method in practice today.8 Basically, electroless plating is an autocatalytic redox process occurring in aqueous solution between ions of the metal to be deposited (generally Ni or Cu) and a strong reducer. Typical procedures involve a variety of multi-step sequences for the preparation of the surfaces to be coated. Conventionally, substrates are cleaned with solvents to remove surface contaminants, chemically etched to obtain a micro-roughened oxidized surface, and then seeded with a catalyst such as palladium. Chronologically, the seeding process was first accomplished by using a two-step procedure involving substrate treatment successively in dilute SnC12 (sensitization step) and PdC12 (activation step) acidic solutions. Further, a one-step procedure using a colloidal suspension containing both Sn and Pd species (a SnC12/PdC12 acidic solution) has been developed and is presently in common use in industrial environments. In this last case, the Pd/Sn colloidal particles adsorbed on the polymer surface must be exposed (acceleration step) to a solubilizer (a HCl or NaOH solution) to remove the excess of Sn+2 species surrounding the catalytic Pd-based core of the colloidal particles. As can easily be inferred from the details of such multi-step procedures, it is today highly desirable to develop alternative approaches for making the insulating surfaces catalytically active. These approaches should require no chemical surface etching, reduce the number of process steps, and provide a highly selective, well-defined interaction between the catalytic species and the surface to be coated.9

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

eBook
USD 16.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 109.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. E. Sacher, J. J. Pireaux, and P. Kowalczyk,Metallization of Polymers(ACS Symposium Series 440, American Chemical Society, Washington, DC, 1990).

    Book  Google Scholar 

  2. K. L. Mittal and J. R. Susko,Metallized Plastics I: Fundamental and Applied Aspects(Plenum Press, New York, 1989).

    Google Scholar 

  3. K. L. Mittal,Metallized Plastics 2: Fundamental and Applied Aspects(Plenum Press, New York, 1991).

    Google Scholar 

  4. K. L. Mittal,Metallized Plastics 3: Fundamental and Applied Aspects(Plenum Press, New York, 1992).

    Book  Google Scholar 

  5. K. L. Mittal,Metallized Plastics: Fundamentals and Applications(Marcel Dekker, New York, 1998).

    Google Scholar 

  6. K. L. Mittal,Metallized Plastics 5&6: Fundamental and Applied Aspects(VSP, Utrecht, The Netherlands, 1998).

    Google Scholar 

  7. K. L. Mittal,Metallized Plastics 7: Fundamental and Applied Aspects(VSP, Utrecht, The Netherlands, 2001).

    Google Scholar 

  8. G. O. Mallory and J. B. Hadju,Electroless Plating: Fundamentals and Applications(American Electroplaters and Surface Finishing Society, Orlando, FL, 1990).

    Google Scholar 

  9. S. L. Brandow, W. J. Dressick, C. R. K. Marrian, G.-M. Chow, and J. M. Calvert, The morphology of electroless Ni deposition on a colloidal Pd(II) catalyst,J. Electrochem. Soc.142(7), 2233–2243 (1995).

    Article  CAS  Google Scholar 

  10. L. Deshayes, M. Alami, M. Charbonnier, N. S. Prakash, and M. Romand, in:Proceedings of the seventeenth annual of the Adhesion Society, edited by K. M. Liechti (The Adhesion Society, Blacksburg, VA, 1994), pp. 115–118.

    Google Scholar 

  11. M. Alami, M. Charbonnier, and M. Romand, in:Proceedings of the eighteenth annual meeting of the Adhesion Society, edited by J. W. Holubka (The Adhesion Society, Blacksburg, VA, 1995), pp. 83–85.

    Google Scholar 

  12. M. Charbonnier, M. Alami, and M. Romand, Plasma Treatment Process for Palladium Chemisorption onto Polymers before Electroless Deposition,J. Electrochem. Soc.143(2), 472–480 (1996).

    Article  CAS  Google Scholar 

  13. M. Alami, M. Charbonnier, and M. Romand, Plasma Chemical Modification of Polycarbonate Surfaces for Electroless Plating,J. Adhesion 55, 77–90 (1996).

    Article  Google Scholar 

  14. M. Alami, M. Charbonnier, and M. Romand, Interest of NH3and N2Plasmas for Polymer Surface Treatment Before “Electroless” Metallization,Plasmas Polym.1(2), 113–126 (1996).

    Article  CAS  Google Scholar 

  15. M. Charbonnier, M. Alami, and M. Romand, Electroless plating of polymers: XPS study of the initiation mechanisms,J. Appl. Electrochem.28(4), 449–453 (1998).

    Article  CAS  Google Scholar 

  16. M. Romand, M. Charbonnier, M. Alami, and J. Baborowski, in:Metallized Plastics 5&6: Fundamental and Applied Aspects, edited by K. L. Mittal (VSP, Utrecht, The Netherlands, 1998), pp. 3–23.

    Google Scholar 

  17. M. Charbonnier, M. Romand, and M. Alami, in:Polymer Surface Modification: Relevance to Adhesion, Vol. 2, edited by K. L. Mittal (VSP, Utrecht, The Netherlands, 2000), pp. 29–43.

    Google Scholar 

  18. M. Charbonnier, M. Romand, G. Stremdoerfer, and A. Farès-Karam, Electroless Metallization of Polymers,Recent Res. Devel. Macromol. Res.4, 27–43 (1999).

    CAS  Google Scholar 

  19. M. Charbonnier, M. Romand, E. Harry, and M. Alami, Surface plasma functionalization of polycarbonate: Application to electroless nickel and copper plating,J. Appl. Electrochem.31(1), 57–63 (2001).

    Article  CAS  Google Scholar 

  20. M. Charbonnier, M. Romand, U. Kogelschatz, H. Esrom, and R. Seeböck, in:Metallized Plastics 7: Fundamental and Applied Aspects, edited by K. L. Mittal (VSP, Utrecht, The Netherlands, 2001), pp. 3–26.

    Google Scholar 

  21. M. Charbonnier, M. Romand, H. Esrom, and R. Seeböck, Functionalization of Polymer Surfaces Using Excimer VUV Systems and Silent Discharges. Application to Electroless Metallization,J. Adhesion(2001) (in press).

    Google Scholar 

  22. Y. Goepfert, M. Charbonnier, and M. Romand, in:Proceedings of the 24th annual meeting of the Adhesion Society, edited by J. A. Emerson (The Adhesion Society, Blacksburg, VA, 2001), pp. 183–186.

    Google Scholar 

  23. L. J. Gerenser, An x-ray photoemission spectroscopy study of chemical interactions at silver/plasma modified polyethylene interfaces: correlations with adhesion,J. Vac. Sci. Technol. A 6(5), 2897–2903 (1988).

    Article  CAS  Google Scholar 

  24. R. Foerch, N. S. Mclntyre, R. N. S. Sodhi, and D. H. Hunter, Nitrogen plasma treatment for polyethylene and polystyrene in a remote plasma reactor,J. Appl. Polym. Sci.40, 1903–1915 (1990).

    Article  CAS  Google Scholar 

  25. J. R. Hollahan, B. B. Stafford, R. D. Falb, and S. T. Payne, Attachment of amino groups to polymer surfaces by radiofrequence plasmas,J. Appl. Polym. Sci.13, 807–816 (1969).

    Article  CAS  Google Scholar 

  26. J. E. Klemberg-Sapieha, O. M. Kilttel, L. Martinu, and M. R. Wertheimer, Dual-frequency N2and NH3plasma modification of polyethylene and polyimide,J. Vac. Sci. Technol. A 9(6), 2975–2981 (1991).

    Article  CAS  Google Scholar 

  27. M. K. Shi, A. Selmani, L. Martinu, E. Sacher, M. R. Wertheimer, and A. Yelon, Fluoropolymer surface modification for enhanced metal adhesion,J. Adhesion Sci. Technol.8(10), 1129–1141 (1994).

    Article  CAS  Google Scholar 

  28. M. K. Shi, A. Selmani, L. Martinu, E. Sacher, M. R. Wertheimer, and A. Yelon, in:Polymer Surface Modification: Relevance to Adhesion, edited by K. L. Mittal (VSP, Utrecht, 1996), pp. 73–85.

    Google Scholar 

  29. E. Sacher, Fluoropolymer metallization for microelectronic applications,Progr. Surface Sci.47, 273–300 (1994).

    Article  CAS  Google Scholar 

  30. V. André Y. De Puydt, F. Arefi, J. Amouroux, P. Bertrand, and J. F. Silvain, in:Metallization of Polymers, edited by E. Sacher, J. J. Pireaux, and S. P. Kowalczyk (ACS Symposium Series 440, American Chemical Society, Washington, DC, 1990), pp. 421–432.

    Google Scholar 

  31. F. D. Egitto and L. J. Matienzo, Modification of polytetrafluoroethylene and polyethylene surfaces down-stream from helium microwave plasma,Polym. Degrad. Stab.30, 293–297 (1991).

    Article  Google Scholar 

  32. J. E. Klemberg-Sapieha, L. Martinu, S. Sapieha and M. R. Wertheimer, in:The Interfacial Interactions in Polymeric Composites, edited by G. Akovali, Nato ASI Series, Series E: Applied Sciences - Vol. 230 (Kluwer Academic Publishers, Dordrecht, 1993), pp. 201–222.

    Chapter  Google Scholar 

  33. F. R. Nartley,Chemistry of the platinum group metals. Recent developments. Studies in inorganic chemistry II(Elsevier, Amsterdam, 1991).

    Google Scholar 

  34. J. M. Calvert, W. J. Dressick, C. S. Dulcey, M.-S. Chen, J. H. Georger, D. A. Stenger, T. S. Koloski, and G. S. Calabrese, in:Polymers for Microelectronics, Resists and Dielectrics, edited by C. F. Thomson, C. G. Wilson, and S. Tagawa, ACS Symposium Series 537 (American Chemical Society, Washington, DC, 1994), pp. 210–219.

    Google Scholar 

  35. W. J. Dressick, C. S. Dulcey, J. H. Georger, G. S. Calabrese, and J. M. Calvert, Covalent binding of Pd catalysts to ligating self-assembled monolayer films for selective electroless metal deposition,J. Electro-chem. Soc.141(1), 210–220 (1994).

    Article  CAS  Google Scholar 

  36. M.-S. Chen, S. L. Brandow, C. S. Dulcey, W. J. Dressick, G. N. Taylor, J. F. Bohland, J. H. Georger, E. K. Pavelchek, and J. M. Calvert, Channel-constrained electroless metal deposition on ligating self-assembled film surfaces,J. Electrochem. Soc.146(4), 1421–1430 (1999).

    Article  CAS  Google Scholar 

  37. D. R. Wheeler and H. Osaki, in:Metallization of Polymers, edited by E. Sacher, J. J. Pireaux, and S. P. Kowalczyk (ACS Symposium Series 440, American Chemical Society, Washington, DC, 1990), pp. 500–512.

    Chapter  Google Scholar 

  38. E. K. Chong and M. G. Stevens, in:Metallized Plastics 5&6: Fundamental and Applied Aspects, edited by K. L. Mittal (VSP, Utrecht, The Netherlands, 1998), pp. 409–422.

    Google Scholar 

  39. P. H. Wojciechowski and M. S. Mendolia, On the multiple fracture of low elongation thin films deposited on high-elongation substrates,J. Vac. Sci. Technol. A 7(3), 1282–1288 (1989).

    Article  CAS  Google Scholar 

  40. Y. Pitton, S. D. Hamm, F.-R. Lang, H. J. Mathieu, Y. Leterrier, and J.-A. Månson, Adhesion study of SiOx/PET films: comparison between scratch test and fragmentation test,J. Adhesion Sci. Technol.10(10), 1047–1065 (1996).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2002 Springer Science+Business Media New York

About this chapter

Cite this chapter

Romand, M., Charbonnier, M., Goepfert, Y. (2002). Plasma and VUV Pretreatments of Polymer Surfaces for Adhesion Enhancement of Electrolessly Deposited Ni or Cu Films. In: Sacher, E. (eds) Metallization of Polymers 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-0563-1_16

Download citation

  • DOI: https://doi.org/10.1007/978-1-4615-0563-1_16

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-5134-4

  • Online ISBN: 978-1-4615-0563-1

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics