Comparison of Methods

Abstract

There are three methods typically used to convert mechanical motion to an electrical signal. They are: electromagnetic (inductive), electrostatic (capacitive), and piezoelectric. These three methods are all commonly used for inertial sensors as well as for actuators. Conversion of energy intended as a power source rather than a sensor signal will use the same methods, however, the design criteria are significantly different, and therefore the suitability of each method should be re-evaluated in terms of its potential for energy conversion on the meso and micro scale. This chapter will provide an initial, primarily qualitative, comparison of these three methods. The comparison will be used as a basis to identify the areas that merit further detailed analysis.