Abstract
Plasma physics has a reputation of being very difficult to understand, and this is probably true when compared with fluid dynamics or electromagnetics in dielectric media. The reason is twofold. First, being a charged fluid, a plasma’s particles interact with one another not just by collisions, but by long-range electric and magnetic fields. This is more complicated than treating the charged particles one at a time, such as in an electron beam, because the fields are modified by the plasma itself , and plasma particles can move to shield one another from imposed electric fields. Second, most plasmas are too tenuous and hot to be considered continuous fluids, such as water (≈3 × 1022 cm−3) or air (≈3 × 1019 cm−3). With particle densities of 109−13 cm−3 , plasmas do not always behave like continuous fluids. The discrete nature of the ions and electrons makes a difference; this kind of detail is treated in the kinetic theory of plasmas. Fortunately , with a few exceptions, the fluid theory of plasmas is all that is required to understand the behavior of low-temperature industrial plasmas, and the quantum mechanical effects of semiconducting solids also do not come into play.
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© 2003 Springer Science+Business Media New York
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Chen, F.F., Chang, J.P. (2003). Plasma Fundamentals. In: Lecture Notes on Principles of Plasma Processing. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-0181-7_2
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DOI: https://doi.org/10.1007/978-1-4615-0181-7_2
Publisher Name: Springer, Boston, MA
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