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Introduction

  • Chapter
Practical Scanning Electron Microscopy

Abstract

In our rapidly expanding technology, the scientist today is more frequently required to observe and correctly explain phenomena occurring on a micrometer (μm) and submicrometer scale. The electron microprobe and scanning electron microscope are two powerful instruments which permit the characterization of heterogeneous materials and surfaces on such a local scale. In both instruments, the area to be examined is irradiated with a finely focused electron beam, which may be static, or swept in a raster across the surface of the specimen. The types of signals which are produced when the focused electron beam impinges on a specimen surface include secondary electrons, backscattered electrons, characteristic x-rays, Auger electrons, and photons of various energies. They are obtained from specific emission volumes within the sample and are used to measure many characteristics of the sample (composition, surface topography, crystallography, etc.).

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Author information

Authors and Affiliations

  1. Metallurgy and Materials Science Department, Lehigh University, Bethlehem, Pennsylvania, USA

    J. I. Goldstein

  2. Institute for Materials Research, National Bureau of Standards, Washington, D.C., USA

    H. Yakowitz & D. E. Newbury

Authors
  1. J. I. Goldstein
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  2. H. Yakowitz
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  3. D. E. Newbury
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Editor information

Editors and Affiliations

  1. Metallurgy and Materials Science Department, Lehigh University, Bethlehem, Pennsylvania, USA

    Joseph I. Goldstein

  2. U.S Deparment of Commerce, National Bureau of Standards, Washington D.C., USA

    Harvey Yakowitz

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© 1975 Plenum Press, New York

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Goldstein, J.I., Yakowitz, H., Newbury, D.E. (1975). Introduction. In: Goldstein, J.I., Yakowitz, H. (eds) Practical Scanning Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-4422-3_1

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  • DOI: https://doi.org/10.1007/978-1-4613-4422-3_1

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-4424-7

  • Online ISBN: 978-1-4613-4422-3

  • eBook Packages: Springer Book Archive

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