Abstract
This paper introduces some of the techniques used to create a sensing element as an integral part of a piece of silicon which may also contain integrated electronic circuitry for signal processing. The extremely small, relatively cheap sensors which can be made using these techniques have potential applications particularly in the field of medicine, where sensors implanted in the body can detect chemical and physical parameters for diagnosis and control of abnormal body functions. This article places some emphasis on the potential and problems of the technology for these in vivo applications.
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© 1990 Chapman & Hall
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Barth, P.W. (1990). Silicon sensors meet integrated circuits. In: Loxton, R., Pope, P. (eds) Instrumentation: A Reader. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-2263-4_12
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DOI: https://doi.org/10.1007/978-1-4613-2263-4_12
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-412-53400-3
Online ISBN: 978-1-4613-2263-4
eBook Packages: Springer Book Archive