Abstract
In another paper in these proceedings, Opsal [1] discusses the origin of the modulated reflectance signal observed in silicon under the experimental conditions employed in the Therma-Probe system [2]. These experimental conditions are described in the paper by Smith, Hahn and Arst in these proceedings [3]. Table I lists the major differences between our type of modulated optical reflectance experiments and the more conventional photoreflectance experiments [4–10].
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Rosencwaig, A., Opsal, J., Taylor, M.W. (1987). Temporal Behavior of Modulated Reflectance Signal in Silicon. In: Thompson, D.O., Chimenti, D.E. (eds) Review of Progress in Quantitative Nondestructive Evaluation. Review of Progress in Quantitative Nondestructive Evaluation, vol 6 A. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-1893-4_27
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DOI: https://doi.org/10.1007/978-1-4613-1893-4_27
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