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High-Intensity Beams

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Electron and Ion Optics

Part of the book series: Microdevices ((MDPF))

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Abstract

We have discussed the role of the beam’s own space charge as a source of aberrations in Section 5-6-2. We know that space charge has two basic forms: distributed charge and interactions of individual particles. In this chapter the problem of distributed space charge will be considered in some detail, followed by a short discussion of the Boersch effect.

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© 1988 Plenum Press, New York

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Szilagyi, M. (1988). High-Intensity Beams. In: Electron and Ion Optics. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0923-9_12

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  • DOI: https://doi.org/10.1007/978-1-4613-0923-9_12

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4612-8247-1

  • Online ISBN: 978-1-4613-0923-9

  • eBook Packages: Springer Book Archive

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