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State-of-the-Art for Nanomanufacturing Using Ion-Beam Technology

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Handbook of Manufacturing Engineering and Technology

Abstract

Ion-beam manufacturing is developing toward nanoaccuracy and nanoscale. In this regard, the concept and working principle of ion-beam manufacturing in nanoaccuracy and nanoscale are presented in this chapter. The key techniques for ion-beam manufacturing are discussed with an emphasis on their capabilities in the fabrication of micro-/nano-features. The corresponding typical applications involved in ion-beam manufacturing are provided. The recent developments in ion-beam-related instruments are given as well. Finally, the future trends for ion-beam manufacturing are predicted.

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Acknowledgments

The book’s publication is supported by the National Natural Science Foundation of China (No. 90923038, 51275559, 50935001), National Basic Research Program of China (973 Program, Grant No.2011CB706700), Ministry of Industry and Information Technology (No. 2011ZX04014-071), National High Technology Research and Development Program of China (863 Program, Grant No. 2012AA040405), and the “111” project by the State Administration of Foreign Experts Affairs and the Ministry of Education of China (Grant No. B07014).

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Authors and Affiliations

  1. State Key Laboratory of Precision Measuring Technology & Instruments, College of Precision Instrument and Opto-electronic Engineering, Centre of MicroNano Manufacturing Technology, Tianjin University, No.92 Weijin Road, Nankai District, Tianjin, 300072, China

    Prof. Fengzhou Fang & Zongwei Xu

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  1. Prof. Fengzhou Fang
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  2. Zongwei Xu
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Correspondence to Fengzhou Fang .

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Editors and Affiliations

  1. National University of Singapore, Singapore, Singapore

    Andrew Nee

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Fang, F., Xu, Z. (2013). State-of-the-Art for Nanomanufacturing Using Ion-Beam Technology. In: Nee, A. (eds) Handbook of Manufacturing Engineering and Technology. Springer, London. https://doi.org/10.1007/978-1-4471-4976-7_62-1

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  • DOI: https://doi.org/10.1007/978-1-4471-4976-7_62-1

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  • Online ISBN: 978-1-4471-4976-7

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