Abstract
In this chapter, the conventional models of acoustic resonators, such as Mason, KLM, and Lakin, are considered as a general background and possibility of their application (with adequate modifications) for modelling of the tuneable FBARs. In ferroelectric-based tuneable FBARs, the basic parameters, stiffness, acoustic velocity, and relative dielectric permittivity of the ferroelectric film are assumed to be DC electric field dependent.
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Gevorgian, S., Tagantsev, A.K., Vorobiev, A. (2013). Models of FBARs. In: Tuneable Film Bulk Acoustic Wave Resonators. Engineering Materials and Processes. Springer, London. https://doi.org/10.1007/978-1-4471-4944-6_3
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DOI: https://doi.org/10.1007/978-1-4471-4944-6_3
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