Skip to main content
SpringerLink
Log in

Semiconductor Manufacturing

  • Chapter
  • First Online:
Green Manufacturing

Abstract

Semiconductor manufacturing, one of the fields of manufacturing in which the USA has played a dominant role for decades, is seen as a major consumer of resources and a source of environmental impact. The objective of this chapter is to introduce the basics of semiconductor manufacturing and, then, look at a detailed analysis of the energy and global warming impact of manufacturing one typical semiconductor product, the complementary metal oxide semiconductor (CMOS) chip. Process steps are reviewed, materials, consumables, and waste streams described, and then an example of applying life-cycle analysis to CMOS fabrication and use (including materials processing through transportation and use phases) is presented. The level of data detail required is illustrated along with trends in manufacturing and environmental impact over several technology nodes.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
eBook
USD 16.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 99.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 54.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. Boyd S (2009) Life-cycle assessment of semiconductors. Ph.D. thesis, University of California, Berkeley, Mechanical Engineering

    Google Scholar 

  2. Boyd S (2011) Life-cycle assessment of semiconductors. Springer, New York

    Google Scholar 

  3. Zhang TW, Bates SW, Dornfeld DA (2007) Operational energy use of plasmonic imaging lithography. Proceedings of the IEEE international symposium on electronics and environment (ISEE), May 2007

    Google Scholar 

  4. ITRS (2008) Sematech. The international technology roadmap for semiconductors, 2007 edn. Technical report

    Google Scholar 

  5. Filterair (2011) http://www.filterair.info/articles/article.cfm/ArticleID/6ECA4042-A748-400F-8A2FC1798F6B337C/Page/1. Accessed 4 May 2011

  6. N. Krishnan, S. Thurwachter, T. Francis, and P. Sheng (2000) The environmental value systems (env-s) analysis: application to CMP effluent treatment options. Proceedings of the Electrochemical Society (ECS) Conference on improving environmental performance of wafer manufacturing processes. ECS

    Google Scholar 

  7. Krishnan N (2003) Design for environment (DfE) in semiconductor manufacturing. Ph.D. thesis, Mechanical Engineering, University of California at Berkeley

    Google Scholar 

  8. Sherer J (2005) J. Michael Sherer, Semiconductor industry: wafer fab exhaust management, CRC Press, Boca Raton, Florida

    Google Scholar 

  9. WSC (2010) Joint Statement of the 14th Meeting of the World Semiconductor Council (WSC), WSC, May 27, 2010, Seoul, South Korea

    Google Scholar 

  10. Prather MJ, Hsu J (2008) NF3, the greenhouse gas missing from Kyoto. Geophys Res Lett 35:L12810

    Article  Google Scholar 

  11. Hoag H (2008) The missing greenhouse gas. Nat Rep Clim Change. doi:10.1038

  12. Energy Star (2011) http://www.energystar.gov/. Accessed 2 May 2011

  13. Alliance to Save Energy (2007) PC energy report 2007, United States. Unpublished report. available online: http://www.climatesaverscomputing.org/docs/Energy_Report_US.pdf

  14. Sustainability Consortium (2011) http://www.sustainabilityconsortium.org/electronics/. Accessed 2 May 2011

  15. Toffel MW, Horvath A (2004) Environmental implications of wireless technologies: news delivery and business meetings. Environ Sci Technol 38(11):2961–2970

    Article  Google Scholar 

  16. Kim J, Xu M, Kahhat R, Allenby B, Williams E (2009) Designing and assessing a sustainable networked delivery (SND) system: hybrid business-to-consumer book delivery case study. Environ Sci Technol 43(1):181–187

    Article  Google Scholar 

  17. Rosenblum J, Horvath A, Hendrickson C (2000) Environmental implications of service industries. Environ Sci Technol 34(22):4669–4676

    Article  Google Scholar 

  18. EPA (2007) EPA report to congress on server and data center energy efficiency. Technical report, U.S. Environmental Protection Agency

    Google Scholar 

  19. Carnegie-Mellon (2009) Carnegie Mellon University Green Design Institute. Economic Input–output life cycle assessment (EIO-LCA), US 1997 industry benchmark model, economic input–output life cycle assessment (EIO-LCA), US 1997 Industry Benchmark model. http://www.eiolca.net. Accessed 15 May 2009

  20. Watanabe A, Kobayashi T, Egi T, Yoshida T (1999) Continuous and independent monitor wafer reduction in DRAM fab. In IEEE International symposium on semiconductor manufacturing conference proceedings, IEEE, pp 303–306

    Google Scholar 

  21. Williams ED, Ayres RU, Heller M (2002) The 1.7 kilogram microchip: energy and material use in the production of semiconductor devices. Environ Sci Technol 36(24):5504–5510

    Article  Google Scholar 

  22. Plepys A (2004) The environmental impacts of electronics: going beyond the walls of semiconductor fabs. Proceedings of the IEEE international symposium on electronics and the environment, IEEE, pp 159–165

    Google Scholar 

  23. Krishnan N, Williams E, Boyd S (2008a) Case studies in energy use to realize ultra-high purities in semiconductor manufacturing. Proceedings of the IEEE international symposium on electronics and the environment, IEEE

    Google Scholar 

  24. Kim S, Overcash M (2003) Energy in chemical manufacturing processes: gate-to-gate information for life cycle assessment. J Chem Technol Biotechnol 78(8):995–1005

    Article  Google Scholar 

  25. Phylipsen GJM, Alsema EA (1995) Environmental life-cycle assessment of multicrystalline silicon solar cell modules (report no. 95057). Technical report, Department of Science, Technology and Society, Utrecht University, The Netherlands

    Google Scholar 

  26. Stokes J, Horvath A (2006) Life cycle energy assessment of alternative water supply systems. Int J Life Cycle Assess 11(5):335–343

    Article  Google Scholar 

  27. Williams SM (2007) The Santa Clara Valley Water District Fiscal Year 2007–08 five-year capital improvement program. Technical report, Santa Clara Valley Water District

    Google Scholar 

  28. PG&E (2008) Power content label. Available online: www.pge.com. Last accessed December 2008

  29. Pacca S, Horvath A (2002) Greenhouse gas emissions from building and operating electric power plants in the Upper Colorado River Basin. Environ Sci Technol 36(14):3194–3200

    Article  Google Scholar 

  30. Fthenakis V, Kim H (2007) Greenhouse-gas emissions from solar electric and nuclear power: a life-cycle study. Energy Policy 35:2549–2557

    Article  Google Scholar 

  31. EPA (2008) The emissions & generation resource integrated database for 2007 (eGrid2007) Technical Support Document. U.S. Environmental Protection Agency, September 2008

    Google Scholar 

  32. Di X, Nie Z, Yuan B, Zuo T (2007) Life cycle inventory for electricity generation in China. Int J Life Cycle Assess 12(4):217–224

    Google Scholar 

  33. Williams E (2004) Energy intensity of computer manufacturing: hybrid assessment combining process and economic input–output methods. Environ Sci Technol 38(22):6166–6174

    Article  Google Scholar 

  34. Census Bureau (2005) Statistics for industry groups and industries, annual survey of manufacturers. U.S. Census Bureau, Washington, DC

    Google Scholar 

  35. Sematech (1999) The international technology roadmap for semiconductors: 2005, 2003, 2001 and 1999 editions. Technical report, 1999–2005

    Google Scholar 

  36. Hu SC, Chuah YK (2003) Power consumption of semiconductor fabs in Taiwan. Energy 28(8):895–907

    Article  Google Scholar 

  37. O’Halloran M (2002) Fab utility cost values for cost of ownership (CoO) calculations, Technology Transfer #02034260A-TR, available on-line: www.sematech.org/docubase/abstracts/4260atr.htm. Technical Report 02034260A-TR, International Sematech

  38. Lawrence Berkeley National Laboratory (2001) High-tech Buildings - Market Transformation Projects: A Final Report to CIEE/PG&E, Technical Report LBNL-49112, Berkeley, California. Available online: http://ateam.lbl.gov/cleanroom/index.htm

  39. Krishnan N, Boyd S, Somani A, Raoux S, Clark D, Dornfeld D (2008) A hybrid life cycle inventory of nano-scale semiconductor manufacturing. Environ Sci Technol 42(8):3069–3075

    Article  Google Scholar 

  40. IPCC (2007) PCC Climate change 2007: the physical science basis, contribution of working group I to the fourth assessment report of the intergovernmental panel on climate change. Cambridge University Press, Cambridge

    Google Scholar 

  41. Facanha C, Horvath A (2007) Evaluation of life cycle air emission factors of freight transportation. Environ Sci Technol 41(20):7138–7144

    Article  Google Scholar 

  42. Cremer C, Eichhammer W, Friedewald M, Georgie P, Rieth-Hoerst S, Schlomann B, Zoche P, Aebischer B, Huser A (2003) Energy consumption of information and communication technology in Germany up to 2010. Technical report

    Google Scholar 

  43. Roth KW, Goldstein F, Kleinman J (2002) Energy consumption by office and telecommunications equipment in commercial buildings. volume i: energy consumption baseline, adl 72895–00. Technical report

    Google Scholar 

  44. ITRS (2007) Sematech. The international technology roadmap for semiconductors, 2007 edition. Technical report

    Google Scholar 

  45. Yung-Cheng JC, Cheng F (2005) Application development of virtual metrology in semiconductor industry. Proceedings of the IEEE industrial electronics society conference. IEEE

    Google Scholar 

  46. Hsu J, Lo H, Pan C, Chen Y, Hsieh T (2004) Test wafer control system in 300 mm fab. Semiconductor manufacturing technology workshop proceedings, IEEE, pp 33–36

    Google Scholar 

  47. Foster B, Meyersdor D, Padillo J, Brenner R (1998) Simulation of test wafer consumption in a semiconductor facility. IEEE/SEMI advanced semiconductor manufacturing conference and workshop, IEEE, pp 298–302

    Google Scholar 

  48. IPCC (2001) Good practice guidance and uncertainty management in national greenhouse gas inventories. IPCC-TSU NGGIP, Japan

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. PE INTERNATIONAL, Inc. & Five Winds Strategic Consulting, 344 Boylston St, 3rd Floor, Boston, MA, 02116, USA

    Sarah Boyd

  2. Laboratory for Manufacturing and Sustainability (LMAS), Department of Mechanical Engineering, University of California at Berkeley, 5100A Etcheverry Hall, 1740, Berkeley, CA, 94720-1740, USA

    David Dornfeld

Authors
  1. Sarah Boyd
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. David Dornfeld
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Sarah Boyd .

Editor information

Editors and Affiliations

  1. Laboratory for Manufacturing, and Sustainability (LMAS), University of California, Berkeley, Etcheverry Hall 5100A, Berkeley, 94720-1740, California, USA

    David A. Dornfeld

Rights and permissions

Reprints and permissions

Copyright information

© 2013 Springer Science+Business Media New York

About this chapter

Cite this chapter

Boyd, S., Dornfeld, D. (2013). Semiconductor Manufacturing. In: Dornfeld, D. (eds) Green Manufacturing. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-6016-0_7

Download citation

  • DOI: https://doi.org/10.1007/978-1-4419-6016-0_7

  • Published:

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4419-6015-3

  • Online ISBN: 978-1-4419-6016-0

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics

Search

Navigation