EELS and STEM Assessment of Composition Modulation in InAlAs Tensile Buffer Layers of InGaAs /InAlAs /(100)InP Structures

Estradé, S; Arbiol, J; Peiró, F

doi:10.1007/978-1-4020-8615-1_60

S Estradé³,
J Arbiol^3,4 &
F Peiró³

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 120))

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Summary

In previous work, InGaAs single quantum well structures had been grown on (100) InP, 4° misoriented towards (111). Transmission electron microscopy had shown that the misorientation of the substrate gave rise to a development of lateral contrast modulation that initiated on the InAlAs tensile buffer layer, and it was suggested that contrast modulation could be related to In-rich or Al-rich regions. In the present work, contrast modulation has also been observed in high angle annular dark field imaging; an electron energy loss spectroscopy study of the evolution of plasmon position also supports the hypothesis of compositional modulation.

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Authors and Affiliations

Electronics Department, University of Barcelona, c/ Marti Franques 1, Barcelona, 08028, Spain
S Estradé, J Arbiol & F Peiró
TEM-MAT, Serveis Serveis Cientificotècnics, University of Barcelona, c/ Marti Franques 1, Barcelona, 08028, Spain
J Arbiol

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S Estradé
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J Arbiol
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F Peiró
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Editors and Affiliations

Department of Electronic and Electrical Engineering, University of Sheffield, Mappin Street, Sheffield, S1 3JD, UK
A. G. Cullis
Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge, CB2 3QZ, UK
P. A. Midgley

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Estradé, S., Arbiol, J., Peiró, F. (2008). EELS and STEM Assessment of Composition Modulation in InAlAs Tensile Buffer Layers of InGaAs /InAlAs /(100)InP Structures. In: Cullis, A.G., Midgley, P.A. (eds) Microscopy of Semiconducting Materials 2007. Springer Proceedings in Physics, vol 120. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-8615-1_60

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DOI: https://doi.org/10.1007/978-1-4020-8615-1_60
Publisher Name: Springer, Dordrecht
Print ISBN: 978-1-4020-8614-4
Online ISBN: 978-1-4020-8615-1
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