Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
J. S. Kilby, “Invention of the integrated circuit,” IEEE Transactions on Electron Devices, vol. ED-23, pp. 648-654, 1976.
G. E. Moore, “Cramming more components onto integrated circuits,” Electronics, vol. 38, pp. 114-117, 1965.
A. Manz, N. Graber, and H. M. Widmer, “Miniaturized total chemical analysis systems: a novel concept for chemical sensing,” vol. 1, pp. 244-248, 1990.
G. M. Whitesides, “The origins and the future of microfluidics,” Nature, vol. 442, pp. 368-373, 2006.
J. El-Ali, P. K. Sorger, and K. F. Jensen, “Cells on chips,” Nature, vol. 442, pp. 403-411, 2006.
D. J. Harrison, K. Fluri, K. Seiler, F. Zhonghui, C. S. Effenhauser, and A. Manz, “Micromachining a miniaturized capillary electrophoresis-based chemical analysis system on a chip,” Science, vol. 261, pp. 895-897, 1993.
T. Thorsen, S. J. Maerkl, and S. R. Quake, “Microfluidic large-scale integra- tion,” Science, vol. 298, pp. 580-584, 2002.
H. Lee, Y. Liu, E. Alsberg, D. E. Ingber, R. M. Westervelt, and D. Ham, “An IC/microfluidic hybrid microsystem for 2D magnetic manipulation of individual biological cells,” 2005 IEEE International Solid-State Circuits Conference Dig. Tech. Papers, vol. 1, pp. 80-81, 2005.
H. Lee, Y. Liu, R. M. Westervelt, and D. Ham, “IC/microfluidic hybrid sys- tem for magnetic manipulation of biological cells,” IEEE Journal of SolidState Circuits, vol. 41, pp. 1471-1480, 2006.
M. Schienle, C. Paulus, A. Frey, F. Hofmann, B. Holzapβ, P. Schindler-Bauer, and R. Thewes, “A fully electronic DNA sensor with 128 positions and inpixel A/D conversion,” IEEE Journal of Solid-State Circuits, vol.39, pp. 2438-2445, 2004.
R. H. Farahi, A. Passian, T. L. Ferrell, and T. Thundat, “Microfluidic manipu- lation via Marangoni forces,” Applied Physics Letters, vol. 85, pp. 4237-4239, 2004.
T. K. Jun and K. Chang-Jin, “Valveless pumping using traversing vapor bub- bles in microchannels,” Journal of Applied Physics, vol. 83, pp. 5658-5664, 1998.
D. L. Huber, R. P. Manginell, M. A. Samara, B. I. Kim, and B. C. Bunker, “Programmed adsorption and release of proteins in a microfluidic device,” Science, vol. 301, pp. 352-354, 2003.
D. Psaltis, S. R. Quake, and C. Yang, “Developing optofluidic technology through the fusion of microfluidics and optics,” Nature, vol. 442, pp. 381-386, 2006.
A. J. DeMello, “Control and detection of chemical reactions in microfluidic systems,” Nature, vol. 442, pp. 394-402, 2006.
H. A. Stone, A. D. Stroock, and A. Ajdari, “Engineering flows in small de- vices: microfluidics toward a lab-on-a-chip,” Annual review of fluid mechanics, vol. 36, pp. 381-411, 2004.
T. H. Lee, The design of CMOS radio-frequency integrated circuits. Cambridge, [England] New York: Cambridge University Press, 1998.
N.-T. Nguyen and S. T. Wereley, Fundamentals and applications of microflu- idics. Boston, MA: Artech House, 2002.
H. Becker and C. Gartner, “Polymer microfabrication methods for microflu- idic analytical applications,” Electrophoresis, vol. 21, pp. 12-26, 2000.
F. E. H . Tay, J. A. van Kan, F. Watt, and W. O. Choong, “A novel micro- machining method for the fabrication of thick-film SU-8 embedded microchannels,” Journal of Micromechanics and Microengineering, vol. 11, pp. 27-32, 2001.
B. E. J. Alderman, C. M. Mann, D. P. Steenson, and J. M. Chamberlain, “Microfabrication of channels using an embedded mask in negative resist,” Journal of Micromechanics and Microengineering, vol. 11, pp. 703-705, 2001.
K. Lee, J. He, R. Clement, S. Massia, and B. Kim, “Biocompatible ben- zocyclobutene (BCB)-based neural implants with micro-fluidic channel,” Biosensors & Bioelectronics, vol. 20, pp. 404-407, 2004.
S. Metz, R. Holzer, and P. Renaud, “Polyimide-based microfluidic devices,” Lab Chip, vol. 1, pp. 29-34, Sep 2001.
M. Agirregabiria, F. J. Blanco, J. Berganzo, M. T. Arroyo, A. Fullaondo, K. Mayora, and J. M. Ruano-Lopez, “Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps,” Lab on a Chip, vol. 5, pp. 545-552, 2005.
H. Lee, Y. Liu, D. Ham, and R. M. Westervelt, “Integrated Cell Manipulation System- CMOS/Microfluidic Hybrid,” Lab on a Chip, DOI:10.1039/ B700373K.
Y. N. Xia and G. M. Whitesides, “Soft lithography,” Annual Review of Materials Science, vol. 28, pp. 153-184, 1998.
W. J. Chang, D. Akin, M. Sedlak, M. R. Ladisch, and R. Bashir, “Poly(dimethylsiloxane) (PDMS) and silicon hybrid biochip for bacterial culture,” Biomedical Microdevices, vol. 5, pp. 281-290, 2003.
P. Vulto, N. Glade, L. Altomare, J. Bablet, L. Del Tin, G. Medoro, I. Chartier, A. N. Manaresi, M. Tartagni, and R. Guerrieri, “Microfluidic channel fabrication in dry film resist for production and prototyping of hybrid chips,” Lab on a Chip, vol. 5, pp. 158-162, 2005.
M. O. Heuschkel, L. Guerin, B. Buisson, D. Bertrand, and P. Renaud, “Buried microchannels in photopolymer for delivering of solutions to neurons in a network,” Sensors and Actuators B, vol. B48, pp. 356-361, 1998.
H. Becker and U. Heim, “Hot embossing as a method for the fabrication of polymer high aspect ratio structures,” Sensors and Actuators A: Physical, vol. 83, pp. 130-135, 2000.
M. Heckele and W. K. Schomburg, “Review on micro molding of thermo- plastic polymers,” Journal of Micromechanics and Microengineering, vol. 14, pp. R1-14, 2004.
M. Worgull, J. F. Hetu, K. K. Kabanemi, and M. Heckele, “Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication,” Microsystem Technologies, vol. 12, pp. 947-952, 2006.
L. J. Kricka, P. Fortina, N. J. Panaro, P. Wilding, G. Alonso-Amigo, and H. Becker, “Fabrication of plastic microchips by hot embossing,” Lab on a Chip, vol. 2, pp. 1-4, 2002.
W. Ehrfeld, V. Hessel, H. Lowe, C. Schulz, and L. Weber, “Materials of LIGA technology,” Microsystem Technologies, vol. 5, pp. 105-112, 1999.
N. Maluf and K. Williams, Introduction to microelectromechanical systems engineering, 2nd ed. Boston: Artech House, 2004.
C. K. Fredrickson and Z. H. Fan, “Macro-to-micro interfaces for microfluidic devices,” Lab Chip, vol. 4, pp. 526-33, Dec 2004.
B. L. Gray, D. Jaeggi, N. J. Mourlas, B. P. van Drieenhuizen, K. R. Williams, N. I. Maluf, and G. T. A. Kovacs, “Novel interconnection technologies for in- tegrated microfluidic systems,” Sensors and Actuators A (Physical), vol. 77, pp. 57-65, 1999.
T. P. Hunt, H. Lee, R. M. Westervelt, “Addressable micropost array for the dielectrophoretic manipulation of particles in fluid,” Applied Physics Letters, vol. 85, pp. 6421-6423, 2004.
J. H. Lau and S.-W. R. Lee, Chip scale package (CSP) : design, materials, processes, and applications. New York: McGraw-Hill, 1999.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2007 Springer Science+Business Media, LLC
About this chapter
Cite this chapter
Lee, H., Ham, D., Westervelt, R.M. (2007). CMOS/Microfluidic Hybrid Systems. In: Lee, H., Westervelt, R.M., Ham, D. (eds) CMOS Biotechnology. Series on Integrated Circuits and Systems. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-68913-5_4
Download citation
DOI: https://doi.org/10.1007/978-0-387-68913-5_4
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-36836-8
Online ISBN: 978-0-387-68913-5
eBook Packages: EngineeringEngineering (R0)