Abstract
This chapter provides a brief overview of the most relevant current silicon processing technologies. A number of high potential future techniques are also presented. Systems based upon silicon are almost ubiquitous in today’s world; as a material, silicon is required to accommodate the growing needs of an increasingly demanding society. A consequence of this is a constant drive for cheaper solutions in providing these systems, which further supports a culture of innovation in silicon technologies. The selected future techniques described here, which have been developed to answer specific challenges in integrating electronic systems into the real-world environment, provide an insight into the ways in which silicon processing is being transformed. They also represent only a sample of the current innovative research in the field silicon processing.
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Healy, T. (2008). Silicon Technologies for Microsystems, Microsensors and Nanoscale Devices. In: Ambient Intelligence with Microsystems. Microsystems, vol 18. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-46264-6_4
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DOI: https://doi.org/10.1007/978-0-387-46264-6_4
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