Abstract
Three-layered titanium-fullerene-titanium films are obtained by thermal evaporation method in vacuum at residual vapor pressure of 1,3·10−3 Pa in the chamber. Titanium — fullerene films were implanted with boron ions of 80 keV energy, at this the doze of implantation was 1·1016 ion/sm2. Structural—phase transformations in films were studied by means of X-ray diffraction, raster electronic microscopy, Auger spectroscopy and X-ray spectrum microanalysis. It is established, that during condensation of a fullerite layer on spreading titanium layer, and then a titanium layer on a fullerite layer there is an intensive diffusion as titanium in a layer of fullerite, and fullerene molecules in a layer of the titanium. Boron ion implantation (E=80 keV, D=1·1016 ion/sm2) of three-layered titanium — fullerenes — titanium films results in formation of new phase of TixOyC60, mixing titanium and fullerene layers, increase oxygen atom part in the films as well.
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Baran, L.V., Shpilevsky, E.M., Okatova, G.P. (2004). Structural-Phase Transformations in Titanium-Fullerene Films at Implantation of Boron Ions. In: Veziroglu, T.N., Yu. Zaginaichenko, S., Schur, D.V., Baranowski, B., Shpak, A.P., Skorokhod, V.V. (eds) Hydrogen Materials Science and Chemistry of Carbon Nanomaterials. NATO Science Series II: Mathematics, Physics and Chemistry, vol 172. Springer, Dordrecht. https://doi.org/10.1007/1-4020-2669-2_9
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DOI: https://doi.org/10.1007/1-4020-2669-2_9
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