Abstract
In this chapter, we review methods and applications of the FIB lift-out specimen preparation technique. A historical overview of the development of the technique is given. The ex-situ and in-situ lift-out techniques are described. Examples, advantages, and disadvantages of each of the techniques are presented.
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References
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Giannuzzi, L.A., Kempshall, B.W., Schwarz, S.M., Lomness, J.K., Prenitzer, B.I., Stevie, F.A. (2005). FIB Lift-Out Specimen Preparation Techniques. In: Giannuzzi, L.A., Stevie, F.A. (eds) Introduction to Focused Ion Beams. Springer, Boston, MA. https://doi.org/10.1007/0-387-23313-X_10
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DOI: https://doi.org/10.1007/0-387-23313-X_10
Publisher Name: Springer, Boston, MA
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