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Multi-degree-of-freedom motion error measurement in an ultraprecision machine using laser encoder — Review

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Abstract

Recently, in accordance with the increasing market demand for ultraprecision technology, a high precision multi-degree-of-freedom displacement measurement technology has become important for industrial applications such as the field of manufacturing and inspection because those physical quantities, linear and angular displacements, are key parameters for keeping and improving quality control of a production system. A number of instruments capable of precise multi-degree-of-freedom measurements have been built and some novel techniques have been introduced. The current state-of-art techniques for multi-degree-of-freedom motion error measurement in a linear stage using laser encoder-implemented system are reviewed. First, we summarize the basic principles behind the measurement technology of the motion error in a stage and simple encoder system. Next, the basic design principles of practical laser encoder system are discussed using the experience of past and existing cases to refer to the important points and the major scientific results. The current trends in the field are significantly discussed, including the novel techniques under construction and advanced technologies. Lastly, the future of multi-functional laser encoder-implemented system, highlighting the kinds of new science upcoming in the next few years, is discussed.

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Authors and Affiliations

  1. School of Mechatronics, Gwangju Institute of Science and Technology, 123 Cheom-dan Gwagiro, Buk-gu, Gwangju, 500-712, Korea

    ChaBum Lee & Sun-Kyu Lee

  2. Research Institute for Solar and Sustainable Energies, Gwangju Institute of Science and Technology, 123 Cheom-dan Gwagiro, Buk-gu, Gwangju, 500-712, Korea

    Sun-Kyu Lee

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  1. ChaBum Lee
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Correspondence to Sun-Kyu Lee.

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Recommended by Associate Editor Song Min Yoo

ChaBum Lee received a B.S in Mechanical Engineering from Chung-Ang University in 2006 and an M.S and Ph.D from Gwangju Institute of Science and Technology in 2008 and 2012, respectively. His research interests include optical measurement, analysis and fabrication of diffractive optical components, and design of optical components.

Sun-Kyu Lee received a B.S in Mechanical Engineering from Seoul National University in 1980, and a Doctor of Engineering in Mechanical Engineering for Production from Tokyo Institute of Technology in 1991. Dr. Lee was a part of research endeavors in the field of machine tool for high speed machining, and he has specialty in the rolling bearing-spindle design and manufacturing. Dr. Lee is currently a professor at the School of Mechatronics in Gwangju Institute of Science and Technology, Korea. His research interests include ultraprecision machine design and precision machining, and precision measurement.

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Lee, C., Lee, SK. Multi-degree-of-freedom motion error measurement in an ultraprecision machine using laser encoder — Review. J Mech Sci Technol 27, 141–152 (2013). https://doi.org/10.1007/s12206-012-1217-6

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