Skip to main content
Log in

Nonlinear static and dynamic responses of an electrically actuated viscoelastic microbeam

  • Research Paper
  • Published:
Acta Mechanica Sinica Aims and scope Submit manuscript

Abstract

On the basis of the Euler–Bernoulli hypothesis, nonlinear static and dynamic responses of a viscoelastic microbeam under two kinds of electric forces [a purely direct current (DC) and a combined current composed of a DC and an alternating current] are studied. By using Taylor series expansion, a governing equation of nonlinear integro-differential type is derived, and numerical analyses are performed. When a purely DC is applied, there exist an instantaneous pull-in voltage and a durable pull-in voltage of which the physical meanings are also given, whereas under an applied combined current, the effect of the element relaxation coefficient on the dynamic pull-in phenomenon is observed where the largest Lyapunov exponent is taken as a criterion for the dynamic pull-in instability of viscoelastic microbeams.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. McCarthy B., Adams G.G., McGruer N.E.: A dynamic model, including contact bounce, of an electrostatically actuated microswitch. J. Microelectromech. Syst. 11(3), 276–283 (2002)

    Article  Google Scholar 

  2. Zhang W.M., Meng G.: Nonlinear dynamical system of micro-cantilever under combined parametric and forcing excitation in MEMS. Sens. Actuators A 119, 291–299 (2005)

    Article  Google Scholar 

  3. De S.K., Aluru N.R.: Complex oscillations and chaos in electrostatic microelectromechanical systems under superharmonic excitations. Phys. Rev. Lett. 94(204101), 1–4 (2005)

    Google Scholar 

  4. Xu L., Jia X.: Electromechanical coupled nonlinear dynamics for microbeams. Arch. Appl. Mech. 77, 485–502 (2007)

    Article  Google Scholar 

  5. Zhang W.M., Meng G., Chen D.: Stability, nonlinear and reliability of electrostatically actuated MEMS devices. Sensors 7, 760–796 (2007)

    Article  Google Scholar 

  6. Osterberg P.M., Senturia S.D.: M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures. J. Microelectromech. Syst. 6(2), 107–118 (1997)

    Article  Google Scholar 

  7. Younis M.I., Nayfeh A.H.: A study of nonlinear response of a resonant microbeam to an electric actuation. Nonlinear Dyn. 31, 91–117 (2003)

    Article  MATH  Google Scholar 

  8. Zhang L.X., Zhao Y.P.: Electromechanical model of RF MEMS switches. Microsyst. Technol. 9, 420–426 (2003)

    Article  Google Scholar 

  9. Krylov S., Maimon R.: Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force. J. Vib. Acoust. 126, 332–342 (2004)

    Article  Google Scholar 

  10. Sadeghian H., Rezazadeh G.: The influence of stress gradient on the pull-in phenomena of microelectromechanical switches. J. Phys. Conf. Ser. 34, 1117–1122 (2006)

    Article  Google Scholar 

  11. Nayfeh A.H., Younis M.I., Abdel-Rahman E.M.: Dynamic pull-in phenomenon in MEMS resonators. Nonlinear Dyn. 48, 153–163 (2007)

    Article  Google Scholar 

  12. Batra R.C., Porfiri M., Spinello D.: Vibrations of narrow microbeams predeformed by an electric field. J. Sound Vib. 309, 600–612 (2008)

    Article  Google Scholar 

  13. Bethe K., Baumgarten D., Frank J.: Creep of sensor’s elastic elements: metals versus non-metals. Sens. Actuators A 21, 844–849 (1990)

    Article  Google Scholar 

  14. Flügge W.: Viscoelasticity, 2nd edn. Springer, New York (1975)

    MATH  Google Scholar 

  15. Peng F., Fu Y.M.: Characteristics of creep buckling for viscoelastic laminated plates. Acta Mech. Sin. 35(3), 353–356 (2003) (in Chinese)

    Google Scholar 

  16. Pelesko J.A., Bernstein D.H.: Modeling MEMS and NEMS. Chapman & Hall/CRC, Boca Raton (2003)

    MATH  Google Scholar 

  17. Gilat R., Aboudi J.: The Lyapunov exponents as a quantitative criterion for the dynamic buckling of composite plates. Int. J. Solids Struct. 39, 467–481 (2002)

    Article  MATH  Google Scholar 

  18. Krylov S.: Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures. Int. J. Nonlinear Mech. 42, 626–642 (2007)

    Article  Google Scholar 

  19. Goldhirsch I., Sulem P.L., Orszag S.A.: Stability and Lyapunov stability of dynamical systems: a differential approach and a numerical method. Physica D 27, 311–337 (1987)

    Article  MATH  MathSciNet  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to J. Zhang.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Fu, Y.M., Zhang, J. Nonlinear static and dynamic responses of an electrically actuated viscoelastic microbeam. Acta Mech Sin 25, 211–218 (2009). https://doi.org/10.1007/s10409-008-0216-4

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10409-008-0216-4

Keywords

Navigation