Skip to main content
SpringerLink
Log in

Excimer Laser Machining for 3D-Surface Structuring

  • Chapter
Photo-Excited Processes, Diagnostics and Applications

Abstract

This chapter reviews recent developments in the field of 3D-micromachining of surfaces by pulsed laser ablation using different mask projection techniques. The first sections introduce to laser processing and mask projection and summarize the current technology of 3D-laser machining. The basic machining techniques and the design of contour and gray scale masks are described in section 4. In the following sections selected 3D-micromachining techniques and their application in microsystem technology are discussed in detail.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 54.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. S. Fatikov and U. Rembold, Microsystem Technology and Microrobotics (Berlin: Springer, 1997).

    Google Scholar 

  2. C.-M. Ho and Y.-C. Tai, Annu. Rev. Fluid Mech. 30, 579 (1998).

    Article  Google Scholar 

  3. St. Sinzinger and J. Jahns, Microoptics (Weinheim: Wiley-VCH, 1999).

    Google Scholar 

  4. S. M. Shank, Diffractive Optics: Design, Fabrication, and Applications, Vol. 11, Technical Digest Series, Optical Soc. Amer., 302 (1994).

    Google Scholar 

  5. Chr. Gimkiewicz, D. Hagedorn, J. Jahns, E.-B. Kley and F. Thoma, Appl. Opt. 38, 2986 (1999).

    Article  CAS  Google Scholar 

  6. S.M. Metev and V.P. Veiko, Laser-Assisted Microtechnology, Springer Series in Mat. Sci. 19 (Berlin: Springer, 1994).

    Google Scholar 

  7. D. J. Ehrlich, Appl. Surf. Sci. 69, 115 (1993).

    Article  CAS  Google Scholar 

  8. O. Lehmann and M. Stuke, Appl. Phys. A 53, 343 (1991).

    Google Scholar 

  9. F. Bachmann, Chemtronics 4, 149 (1989); D. Basting and U. Stamm, Z. Phys. Chem. 215, 1575 (2001).

    Google Scholar 

  10. R. Srinivasan, ‘Interaction of Laser Radiation with Organic Polymers’, in J. C. Miller (ed.), Laser Ablation, Springer Series in Mat. Sci. 28 (Berlin: Springer, 1994).

    Google Scholar 

  11. J. Ihlemann and B. Wolff-Rottke, Appl. Surf. Sci. 106, 282 (1996).

    Article  CAS  Google Scholar 

  12. H. K. Toenshoff, F. von Alvensleben, H. Kappel and C. Graumann, Production Engineering IV/1, 25 (1997).

    Google Scholar 

  13. E. C. Harvey, P. T. Rumsby, M. C. Gower and J. L. Remnant, Proc. of SPIE 2639, 266 (1995).

    Article  CAS  Google Scholar 

  14. K.-H. Gerlach, J. Jersch, K. Dickmann and L. J. Hildenhagen, Optics & Laser Technol. 29, 439 (1997).

    Article  Google Scholar 

  15. H. J. Kahlert, U. Sarbach, B. Burghardt and B. Klimt, Proc. of SPIE 1835, 110 (1993).

    Article  CAS  Google Scholar 

  16. K. Jasper, P. Berger and H. Huegel, Proc. of SPIE 3618, 403 (1999).

    Article  CAS  Google Scholar 

  17. P. T. Rumsby and M. C. Gower, Proc. of SPIE 1598, 36 (1995).

    Article  Google Scholar 

  18. M. V. Klein and T. E. Furtak, Optik (Berlin: Springer, 1988).

    Google Scholar 

  19. D. Båuerle, Laser Processing and Chemistry (Berlin: Springer, 2000).

    Google Scholar 

  20. J. C. Miller (Ed.), Laser Ablation (Berlin: Springer, 1994).

    Google Scholar 

  21. J. H. Brannon, J. R. Lankard, A. I. Baise, F. Burns and J. Kaufman, J. Appl. Phys. 58, 2036 (1985).

    Article  CAS  Google Scholar 

  22. R. Srinivasan, B. Baren, D. E. Seeger and R. W. Dreyfus, Macromol. 19, 916 (1986).

    Article  CAS  Google Scholar 

  23. S. Küper, J. Brannon and K. Brannon, Appl. Phys. A 56, 43 (1993).

    Google Scholar 

  24. S. Lazare, J. Lopez and F. Weisbruch, Appl. Phys. A 69, 1 (1999).

    Google Scholar 

  25. P. E. Dyer and J. Sidhu, J. Appl. Phys. 57, 1420 (1985).

    Article  CAS  Google Scholar 

  26. H. Frerichs, Theses, Aachen Shaker (1996).

    Google Scholar 

  27. S. Küper and M. Stuke, Appl. Phys. Lett. 54, 4 (1988).

    Article  Google Scholar 

  28. S. Küper and M. Stuke, Appl. Phys. A 49, 211 (1989).

    Google Scholar 

  29. H. Schmidt, J. Ihlemann, B. Wolff-Rottke, K. Luther and J. Troe, J. Appl. Phys. 83, 5458 (1998).

    Article  CAS  Google Scholar 

  30. see e.g. R. E. Russo, D. B. Geohegan, R. F. Hagelund and K. Murakami (Eds.), Proc. 4th Conference on Laser Ablation (Elsevier, 1998).

    Google Scholar 

  31. R. Srinivasan, B. Braren and K. G. Casey, J. Appl. Phys. 68, 1842 (1990); R. Srinivasan, K. G. Casey, B. Braren and M. Yeh, J. Appl. Phys. 67, 1604 (1990).

    Article  CAS  Google Scholar 

  32. T. Lippert, L. S. Bennett, T. Nakamura, H. Niino and A. Yabe, Appl. Surf. Sci. 96–98, 601 (1996).

    Article  Google Scholar 

  33. J. Zang, K. Sugioka, T. Takahashi, K. Toyoda and K. Midorikawa, Appl. Phys. A 71, 23 (2000).

    Google Scholar 

  34. S. Ameer-Beg, W. Perrie, S. Rathbone, J. Wright and W. Weaver, Appl. Surf. Sci. 129, 875 (1998).

    Article  Google Scholar 

  35. J. Wang, H. Niino and A. Yabe, Appl. Phys. A 68, 111 (1999).

    Google Scholar 

  36. R. Böhme, A. Braun and K. Zimmer, Appl. Surf. Sci. 186, 276 (2002).

    Article  Google Scholar 

  37. R. S. Taylor, K. E. Leopold, D. L. Singleton, G. Paraskevopoulos and R. S. Irwin, J. Appl. Phys. 64, 2815 (1988).

    Article  CAS  Google Scholar 

  38. S. Küper and J. Brannon, Appl. Phys. Lett. 60, 1633 (1992).

    Article  Google Scholar 

  39. M. Mendes and R. Vilar, Appl. Surf. Sci. 206, 196 (2003).

    Article  CAS  Google Scholar 

  40. A. Braun, K. Zimmer and F. Bigl, Appl. Surf. Sci. 154–155, 73 (2000).

    Article  Google Scholar 

  41. W. Kesting, T. Bahners, D. Knittel and E. Schoellmeyer, Angew. Makromol. Chem. 212, 129 (1993); L. Wefers, D. Bosbach, W. Rammensee and E. Schollmeyer, Appl. Surf. Sci. 69, 418 (1993).

    Article  CAS  Google Scholar 

  42. J. Heitz, J. D. Pedarnig, D. Båuerle and G. Petzow, Appl. Phys. A 65, 259 (1993).

    Google Scholar 

  43. H. M. van Driel, J. E. Sipe and J. F. Young, Phys. Rev. Lett. 49, 1955 (1982).

    Article  Google Scholar 

  44. M. Birnbaum, J. Appl. Phys. 36, 3688 (1965).

    Article  CAS  Google Scholar 

  45. B. Wolff-Rottke, J. Ihlemann, H. Schmidt and A. Scholl, Appl. Phys. A 60, 13 (1995).

    Google Scholar 

  46. P. E. Dyer, S. D. Jenkins and J. Sidhu, Appl. Phys. Lett. 49, 453 (1986).

    Article  CAS  Google Scholar 

  47. T. W. Hodapp and P. R. Fleming, J. Appl. Phys. 84, 577 (1998).

    Article  CAS  Google Scholar 

  48. B. Braren and R. Srinivasan, J. Vac. Sci. Technol. B3, 913 (1985).

    Google Scholar 

  49. R. Braun, R. Nowak, P. Hess, H. Oetzmann and C. Schmitt, Appl. Surf. Sci. 43, 352 (1989).

    Article  CAS  Google Scholar 

  50. J. R. Lankard Sr. and G. Wolbold, Appl. Phys. A 54, 355 (1992).

    Google Scholar 

  51. U. Sarbach and H.-J. Kahlert, Lamda Highlights 40, Lamda Physik AG (1993).

    Google Scholar 

  52. J. Siegel, K. Ettrich, E. Welsch and E. Matthias, Appl. Phys. A 64, 213 (1997).

    Google Scholar 

  53. L. F. Johnson, K. A. Ingersoll and D. Kahng, Appl. Phys. Lett. 40, 636 (1982).

    Article  CAS  Google Scholar 

  54. A. Bosseboeuf, J. Boulmer and D. Débarre, Appl. Surf. Sci. 109–110, 473 (1997).

    Article  Google Scholar 

  55. F. Frost, A. Schindler and F. Bigl, Appl. Phys. A 66, 663 (1998).

    Google Scholar 

  56. E. C. Harvey and P. T. Rumsby, Proc. of SPIE 3223, 26 (1997).

    Article  Google Scholar 

  57. K. Zimmer, D. Hirsch and F. Bigl, Appl. Surf. Sci. 96, 425 (1996).

    Article  Google Scholar 

  58. A. Braun, K. Zimmer and F. Bigl, Appl. Surf. Sci. 168, 178 (2000).

    Article  CAS  Google Scholar 

  59. K. Zimmer, A. Braun and F. Bigl, Appl. Surf. Sci. 154, 601 (2000).

    Article  Google Scholar 

  60. J. E. Cronin, P. A. Farrar Sr., C. W. Kaanta, J. G. Ryan and A. J. Watte, US 5334467 (1993).

    Google Scholar 

  61. G. P. Behrmann and M. T. Duignan, Appl. Opt. 36, 4666 (1997).

    Article  CAS  Google Scholar 

  62. W. Daschner, P. Long, R. Stein, Ch. Wu and S.H. Lee, Appl. Opt. 36, 4675 (1997).

    Article  CAS  Google Scholar 

  63. Canyon Materials Inc., LDW-Glass Photomask Blanks, product information (1995).

    Google Scholar 

  64. M. Mes and P. P. Vaidyanathan, IEEE Trans. Ima. Proc. 9, 691 (2000).

    Article  Google Scholar 

  65. F. A. Jenkins and H. E. White, Fundamentals of Optics (Singapore: McGraw-Hill Book Company, Int’l Ed., 1981).

    Google Scholar 

  66. K. Rubahn and J. Ihlemann, Appl. Surf. Sci. 127, 881 (1998).

    Article  Google Scholar 

  67. L. H. Kaplan, US 5254202 (1993).

    Google Scholar 

  68. K. Zimmer, A. Braun and F. Bigl, DE 10026960.5 (2000).

    Google Scholar 

  69. A. Braun and K. Zimmer, Appl. Surf. Sci. 186, 200 (2002).

    Article  CAS  Google Scholar 

  70. A. H. Smith, R. O. Hunter Jr. and B. B. McArthur, US 5501925 (1994).

    Google Scholar 

  71. A. H. Smith, R. O. Hunter Jr. and B. B. McArthur, US 5538817 (1994).

    Google Scholar 

  72. T. Ohfuji, T. Ogawa, K. Kuhara and M. Sasago,J. Vac. Sci. Technol. B 14, 4203 (1996).

    Article  Google Scholar 

  73. S. Pissadakis, L. Reekie, M. Hempstead, M. N. Zervas and J. S. Wilkinson, Appl. Phys. A 69, 739 (1999).

    Google Scholar 

  74. K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano and H. Hosono, Appl. Phys. B 71, 119 (2000).

    Google Scholar 

  75. P. Simon and J. Ihlemann, Appl. Phys. A 63, 505 (1996).

    Article  Google Scholar 

  76. A. Manz and H. Becker, Microsystems Technology in Chemistry and Life Science, Topics in Current Chemistry 194, 263 (Berlin: Springer, 1998).

    Google Scholar 

  77. W. Ehrfeld, V. Hessel and H. Löwe, Microreactors (Weinheim, Wiley-VCH, 2000).

    Google Scholar 

  78. A. Heuberger, Mikromechanik (Springer Verlag, 1991)

    Google Scholar 

  79. S. Büttgenbach, Mikromechanik (Teubner Verlag, 1994).

    Google Scholar 

  80. Rai-Choudhury, Handbook of Microlithography, Micromachining and Microfabrication, SPIE PM39 (1997).

    Google Scholar 

  81. R. Konrad, Proc. of 1st Conf. on Microreaction Technol. (1997).

    Google Scholar 

  82. S. Mihailov and S. Lazare, Appl. Opt. 32, 6211 (1993).

    Article  CAS  Google Scholar 

  83. F. Beinhorn, J. Ihlemann, K. Luther and J. Troe, Appl. Phys. A 68, 709 (1999).

    Google Scholar 

  84. A. H. Smith, B. B. McArthur and R. O. Hunter Jr., US 5539175 (1994).

    Google Scholar 

  85. C. Lammers and K. Dickmann, Chem. Fibers Intern. 1, 50 (2001).

    Google Scholar 

  86. H. Schmitt, Opto & Laser Europe 13, 35 (1994).

    Google Scholar 

  87. G. Gal, US 5310623 (1992).

    Google Scholar 

  88. K. Zimmer, R. Böhme, A. Braun, B. Rauschenbach and F. Bigl, Appl. Phys. A 74, 453 (2002).

    Google Scholar 

  89. A. Braun, K. Zimmer, B. Hösselbarth, J. Meinhardt, F. Bigl and R. Mehnert, Appl. Surf. Sci. 127, 911 (1998).

    Article  Google Scholar 

  90. A. Braun, J. Meinhardt, K. Zimmer, B. Hösselbarth and F. Bigl, Appl. Surf. Sci. 138, 206 (1999).

    Article  Google Scholar 

  91. K. Zimmer, A. Braun and R. Böhme, Appl. Surf. Sci. 208–209, 199–204 (2003).

    Article  CAS  Google Scholar 

  92. A. Braun, K. Zimmer and F. Bigl, DE 19919009A1 (1999).

    Google Scholar 

  93. A. Braun and K. Zimmer, Proc. of SPIE 4236, 213 (2001).

    Article  Google Scholar 

  94. M. T. Duignan, Diffractive Optics: Design, Fabrication, and Applications, Vol. 11, Technical Digest Series, Optical Soc. Amer. 129 (1994).

    Google Scholar 

  95. C. P. Christensen, Proc. of SPIE 2045, 141 (1994).

    Article  Google Scholar 

  96. A. Braun, Thesis, Fakultåt für Physik und Geowissenschaften der Universitåt Leipzig (2002).

    Google Scholar 

  97. K. Zimmer, A. Braun and M. Kostrzewa, Proc. of SPIE 4236, 58 (2001).

    Article  CAS  Google Scholar 

  98. E.-B. Kley, Microelectronic Engineering 34, 261 (1997).

    Article  CAS  Google Scholar 

  99. T. M. Gale, Replication, in H.P. Herzig (Ed.), Mikrooptic, Taylor & Francis (1997).

    Google Scholar 

  100. J. Arnold, U. Dasbach, W. Ehrfeld, K. Hesch and H. Löwe, Appl. Surf. Sci. 86, 251 (1995).

    Article  CAS  Google Scholar 

  101. R. A. Lawes, A. S. Holmes and F. N. Goodall, Microsys. Technol. 3, 17 (1996).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Leibniz-Institut für Oberflåchenmodifizierung, Permoserstraβe 15, 04318, Leipzig, Germany

    K. Zimmer & A. Braun

Authors
  1. K. Zimmer
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. Braun
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Holon Academic Institute of Technology, Israel

    A. Peled

Rights and permissions

Reprints and permissions

Copyright information

© 2003 Kluwer Academic Publishers

About this chapter

Cite this chapter

Zimmer, K., Braun, A. (2003). Excimer Laser Machining for 3D-Surface Structuring. In: Peled, A. (eds) Photo-Excited Processes, Diagnostics and Applications. Springer, Boston, MA. https://doi.org/10.1007/1-4020-2610-2_11

Download citation

  • DOI: https://doi.org/10.1007/1-4020-2610-2_11

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4020-7527-8

  • Online ISBN: 978-1-4020-2610-2

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation