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N. Yazdi, F. Ayazi, and K. Najafi, Micromachined inertial sensors, Proc. IEEE, Vol.86, pp. 1640–1659, 1998.
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© 2002 Kluwer Academic Publishers
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(2002). A Capacitive Accelerometer. In: Microsystem Design. Springer, Boston, MA. https://doi.org/10.1007/0-306-47601-0_19
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DOI: https://doi.org/10.1007/0-306-47601-0_19
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