Abstract
Thin films of p-type transparent conducting CuAlO2 have been synthesized through reactive radio frequency magnetron sputtering on silicon and glass substrates at substrate temperature 300°C. Reactive sputtering of a target fabricated from Cu and Al powder (1:1.5) was performed in Ar+O2 atmosphere. The deposition parameters were optimized to obtain phase pure, good quality CuAlO2 thin films. The films were characterized by studying their structural, morphological, optical and electrical properties.
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Saha, B., Thapa, R., Jana, S. et al. Optical and electrical properties of p-type transparent conducting CuAlO2 thin film synthesized by reactive radio frequency magnetron sputtering technique. Indian J Phys 84, 1341–1346 (2010). https://doi.org/10.1007/s12648-010-0124-x
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DOI: https://doi.org/10.1007/s12648-010-0124-x