Skip to main content
SpringerLink
Log in

Effects of tin valence on microstructure, optical, and electrical properties of ITO thin films prepared by sol–gel method

  • Original Paper
  • Published:
Journal of Sol-Gel Science and Technology Aims and scope Submit manuscript

Abstract

This study aimed to understand the microstructural, optical, and electrical properties of tin-doped indium oxide (ITO) prepared with tetravalent and divalent tin salts. The influence of tin valence on the electrical, optical, structural, and morphological properties of the films were characterized by the mean of four-point probe, thermogravimetric analysis, differential thermal analysis (DTA), UV–Vis spectroscopy, X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), and X-ray photoelectron spectroscope. XRD results revealed formation of cubic bixbyite structure of In2O3 with a small shift in major peak position toward lower angles with addition of Sn2+ and Sn4+. TG–DTA showed that the optimum heat treatment temperatures for thin films prepared with divalent and tetravalent tin salts are 500 and 450 °C, respectively. FESEM showed that with decreasing tin valence, grain size was gradually increased. The surface coverage for both thin films is similar, without any remarkable cracks. By increasing the tin valence from II to IV, high transparency (88.5 % in the visible region) and low conductivity (10 kΩ/sq.) can be obtained after calcination in air at 450 °C, which can be considered acceptable for electrostatic and antistatic applications of ITO thin films. The Haacke figures of merit at λ = 550 nm are comprised of between 2.94 × 10−5 Ω−1 and 1.83 × 10−5 Ω−1 for ITO prepared from tetravalent and divalent tin salt, respectively.

Graphical Abstract

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10

Similar content being viewed by others

References

  1. Ginley DS, Bright C (2000) Transparent conducting oxides. MRS Bull 25:15–18

    Article  Google Scholar 

  2. Chopra KL, Major S, Pandya DK (1983) Transparent conductors—a status review. Thin Solid Films 102:1–46

    Article  Google Scholar 

  3. Alam MJ, Cameron DC (2000) Optical and electrical properties of transparent conductive ITO thin films deposited by sol–gel process. Thin Solid Films 377–378:455–459

    Article  Google Scholar 

  4. González B, Mason TO, Quintana JP, Warschkow O, Ellis DE, Hwang JH, Hodges JD, Jorgensen JP (2004) Defect structure studies of bulk and nano-indium-tin oxide. J Appl Phys 96:3912–3920

    Article  Google Scholar 

  5. Granqvist CG, Hamberg I (1986) Evaporated Sn-doped In2O3 films: basic optical properties and applications to energy efficient windows. J Appl Phys 60:122–159

    Google Scholar 

  6. Granqvist CG, Hultåker A (2002) Transparent and conducting ITO films: new developments and applications. Thin Solid Films 411:1–5

    Article  Google Scholar 

  7. Hwang JH, Edwards DD, Kammler DR, Mason TO (2000) Point defects and electrical properties of Sn-doped In-based transparent conducting oxides. Solid State Ionics 129:135–144

    Article  Google Scholar 

  8. Sunde TOL, Garskaite E, Otter B, Fossheim HE, Saeterli R, Holmestad R, Einarsrud MA, Grande T (2012) Transparent and conducting ITO thin films by spin coating of an aqueous precursor solution. J Mater Chem 22:15740–15749

    Article  Google Scholar 

  9. Uchihashi H, Touge N, Minami T (1989) Preparation of amorphous Al2O3 thin films from stabilized Al-alkoxides by the sol–gel method. J Ceram Soc Jpn 97:396–399

    Article  Google Scholar 

  10. Houng B (2005) Tin doped indium oxide transparent conducting thin films containing silver nanoparticles by sol–gel technique. Appl Phys Lett 87:251922-1–3

    Article  Google Scholar 

  11. Leite ER, Giraldi TR, Pontes FM, Longo EL, Beltran A, Andres J (2003) Crystal growth in colloidal tin oxide nanocrystals induced by coalescence at room temperature. J Appl Phys Lett 83:1566–1568

    Article  Google Scholar 

  12. Ribeiro C, Lee EJH, Giraldi TR, Longo E, Varela JA, Leite ER (2004) Study of synthesis variables in the nanocrystal growth behavior of tin oxide processed by controlled hydrolysis. J Phys Chem B 108:15612–15617

    Article  Google Scholar 

  13. Rizzato AP, Broussous L, Santilli CV, Pulcinelli SH, Craievich AF (2001) Structure of SnO2 alcohols and films prepared by sol–gel dip coating. J Non-Cryst Solids 284:61–67

    Article  Google Scholar 

  14. Kim DW, Hwang IS, Kwon SJ, Kang HY, Park KS, Choi YJ, Choi KJ, Park JG (2007) Highly conductive coaxial SnO2–In2O3 heterostructured nanowires for Li ion battery electrodes. J Nano Lett 7:3041–3045

    Article  Google Scholar 

  15. Epifani M, Diaz R, Arbiol J, Siciliano P, Morante JR (2006) Solution synthesis of thin films in the SnO2–In2O3 system: a case study of the mixing of sol–gel and metal-organic solution processes. J Chem Mater 18:840–846

    Article  Google Scholar 

  16. Segmüller A, Noyan IN, Sperious V (1989) X-ray diffraction studies of thin films and multilayer structure. Pergamon Press, Oxford

    Google Scholar 

  17. Wagner CNJ (1965). In: Cohen JB, Hilliard JE (eds.) Local atomic arrangements studied by X-ray diffraction, vol 36. Gordon and Breach, New York, p 51

  18. Sen S, Halder SK, Gupta SPS (1973) An X-ray line shift analysis in vacuum evaporated silver films. J Phys D Appl Phys 6:1978–1985

    Article  Google Scholar 

  19. Shigesato Y, Hayashi Y, Haranoh T (1992) Doping mechanisms of tin doped indium oxide films. J Appl Phys Lett 61:73–75

    Article  Google Scholar 

  20. Ishida T, Kobayashi H, Nakato Y (1993) Structures and properties of electron-beam-evaporated indium tin oxide films as studied by X-ray photoelectron spectroscopy and work-function measurements. J Appl Phys 73:4344–4350

    Article  Google Scholar 

  21. Yamaguchi M, Ektessabi AI, Nomura H, Yasui N (2004) Characteristics of indium tin oxide thin films prepared using electron beam evaporation. Thin Solid Films 447–448:115–118

    Article  Google Scholar 

  22. Pujilaksono B, Klement U, Nyborg L, Jelvestam U, Hill S, Burgard D (2005) X-ray photoelectron spectroscopy studies of indium tin oxide nanocrystalline powder. Mater Charact 54:1–7

    Article  Google Scholar 

  23. Moulder JF, Stickle WF, Sobol PE, Bomben KD (1992) Handbook of X-ray photoelectron spectroscopy. Perkin-Elmer Corporation, Eden Prairie, Minnesota

    Google Scholar 

  24. Bryan JD, Gamelin DR (2005) Doped semiconductor nanocrystals: synthesis, characterization, physical properties and applications. J Prog Org Coat 54:47–126

    Google Scholar 

  25. Leite ER, Giraldi TR, Pontes FM, Longo E, Beltran A, Andres J (2003) Crystal growth in colloidal tin oxide nanocrystals induced by coalescence at room temperature. Appl Phys Lett 83:1566–1568

    Article  Google Scholar 

  26. Ribeiro C, Lee EJH, Giraldi TR, Longo E, Varela JA, Leite ER (2004) Study of synthesis variables in the nanocrystal growth behavior of tin oxide processed by controlled hydrolysis. J Phys Chem B 108:15612–15617

    Article  Google Scholar 

  27. Sakka S (2004) Handbook of sol–gel science and technology: processing, characterization, and applications. Kluwer, Boston

    Google Scholar 

  28. Zhang Y (1982) Electronegativities of elements in valence states and their applications: a scale for strengths of Lewis acids. Inorg Chem 21:3889–3893

    Article  Google Scholar 

  29. Lee JS, Choi SC (2005) Solvent effect on synthesis of indium tin oxide nano-powders by a solvothermal process. J Eur Ceram Soc 25:3307–3314

    Article  Google Scholar 

  30. Kim S, Choi S, Park Ch, Jin H (1999) Transparent conductive ITO thin films through the sol–gel process using metal salts. Thin Solid Films 347:155–160

    Article  Google Scholar 

  31. Kim JH, Jeon KA, Kim GH, Lee SY (2006) Electrical, structural, and optical properties of ITO thin films prepared at room temperature by pulsed laser deposition. Appl Surf Sci 252:4834–4837

    Article  Google Scholar 

  32. Bisht H, Eun HT, Mehrtens A, Aegerter MA (1999) Comparison of spray pyrolyzed FTO, ATO and ITO coatings for flat and bent glass substrate. Thin Solid Films 351:109–114

    Article  Google Scholar 

  33. Haacke G (1976) New figure of merit for transparent conductors. J Appl Phys 47:4086–4089

    Article  Google Scholar 

  34. Tauc J (1974) Amorphous and liquid semiconductors. Plenum Press, New York

    Book  Google Scholar 

  35. Kundu S, Biswas PK (2005) Synthesis and photoluminescence property of nanostructured sol–gel indium tin oxide film on glass. Chem Phys Lett 414:107–110

    Article  Google Scholar 

  36. Burstein E (1954) Anomalous optical absorption limit in InSb. Phys Rev 93:632–633

    Article  Google Scholar 

Download references

Acknowledgments

Authors are grateful to the research council of Sharif University of Technology for the financial support of this research.

Author information

Authors and Affiliations

  1. Materials Science and Engineering Department, Sharif University of Technology, P.O. Box 11155-9466, Tehran, Islamic Republic of Iran

    Majid Mirzaee & Abolghasem Dolati

Authors
  1. Majid Mirzaee
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Abolghasem Dolati
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Abolghasem Dolati.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Mirzaee, M., Dolati, A. Effects of tin valence on microstructure, optical, and electrical properties of ITO thin films prepared by sol–gel method. J Sol-Gel Sci Technol 75, 582–592 (2015). https://doi.org/10.1007/s10971-015-3729-x

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10971-015-3729-x

Keywords

Search

Navigation