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Designing arbitrary nanoscale patterns by a nanocavity waveguide with omnidirectional illumination

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Abstract

We report one- and two-dimensional arbitrary patterns which are achieved by nanocavity waveguides made of a quasi-metal–dielectric-metal heterostructure with omnidirectional illumination. This proposed heterostructure supports the surface plasmon polaritons whose phase and group velocities have opposite sign for given frequency. Negative refraction and reflection in the waveguide result in imaging nanolithography and the omnidirectional property can be well understood by the dispersive relation of the nanocavity waveguide. Numerical results demonstrate that such an omnidirectional nanolithography scheme is feasible for arbitrary 1D gratings and 2D linearly chirped gratings with TM and circular polarized incidence, respectively, at 365 nm.

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Acknowledgments

This work is supported by A*Star (092154009), National Research Foundation (NRF-G-CPR 2007-01), Singapore. X.F. Yang acknowledges support from the National Natural Science Foundation of China (Grant No. 11104063) and Doctor Funding Project of Henan Polytechnic University (Grant No. B2011-082).

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Authors and Affiliations

  1. School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore, 639798, Singapore

    Xuefeng Yang, Dao Hua Zhang, Zhengji Xu, Yueke Wang & Jun Wang

  2. School of Physics and Chemistry, Henan Polytechnic University, Jiaozuo, 454000, China

    Xuefeng Yang

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  1. Xuefeng Yang
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  2. Dao Hua Zhang
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  3. Zhengji Xu
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  4. Yueke Wang
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  5. Jun Wang
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Correspondence to Dao Hua Zhang.

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Yang, X., Zhang, D.H., Xu, Z. et al. Designing arbitrary nanoscale patterns by a nanocavity waveguide with omnidirectional illumination. Appl. Phys. B 109, 215–219 (2012). https://doi.org/10.1007/s00340-012-5197-0

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  • DOI: https://doi.org/10.1007/s00340-012-5197-0

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