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Fluence dependence of femtosecond-laser-induced nanostructure formed on TiN and CrN

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Abstract

The fluence dependence of the nanostructure formation, which has been observed in our recent experiments on femtosecond (fs)-laser ablation, was examined in detail for hard thin films of TiN and CrN. The size D of the periodic fine structure formed with fs-laser pulses can be divided into two regions that depend on the laser fluence F, i.e. the region I where D increases rapidly with increasing F near the ablation threshold, and the region II where D increases slowly with an increase in F and almost saturates. The nanostructure has been observed only in the region I with a narrow width of F. The region II produces a periodic ripple structure whose size is 1/2–4/5 of the wavelength used. The effects of the thermal process and material composition on the nanostructure formation are discussed.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Fukui National College of Technology, Sabae, Fukui, 916-8507, Japan

    N. Yasumaru

  2. Institute of Advanced Energy, Kyoto University, Uji, Kyoto, 611-0011, Japan

    K. Miyazaki

  3. Eyetec Co., Ltd., Sabae, Fukui, 916-0016, Japan

    J. Kiuchi

Authors
  1. N. Yasumaru
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  2. K. Miyazaki
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  3. J. Kiuchi
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Correspondence to N. Yasumaru.

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PACS

61.80.Ba; 79.20.Ds; 42.62.Cf

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Yasumaru, N., Miyazaki, K. & Kiuchi, J. Fluence dependence of femtosecond-laser-induced nanostructure formed on TiN and CrN. Appl. Phys. A 81, 933–937 (2005). https://doi.org/10.1007/s00339-005-3218-0

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  • DOI: https://doi.org/10.1007/s00339-005-3218-0

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