Abstract
The laser stereophotolithography is a process which allows the manufacture of 3D parts by a light-induced space-resolved polymerization. In view to obtain microparts, it is necessary on one hand to reduce the polymerization depth and on the other hand the polymerization width in thex-y plane. The addition of an unreactive highly absorbing chemical succeeded in a significant reduction of the polymerization depth (8 to 10 times thinner). We studied the influences of the light flux, of the initiator and the absorbing unreactive chemical concentrations. The experimental data are in good agreement with the theoretical model. The narrowing of the width is disappointing except with one resin. These results nevertheless led us to set up a new apparatus to reduce the beam diameter by a factor of ten. Despite the increase of the light flux, some of the first results are promising.
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This paper was not presented at the International Conference on High Aspect-Ratio Microstructure Technology HARMST '95 in July 1995.
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Zissi, S., Bertsch, A., Jézéquel, J.Y. et al. Stereolithography and microtechniques. Microsystem Technologies 2, 97–102 (1996). https://doi.org/10.1007/BF02447758
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DOI: https://doi.org/10.1007/BF02447758