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Toward Functional Nanomaterials pp 323–398Cite as

Self-Organized Surface Nanopatterning by Ion Beam Sputtering

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Part of the book series: Lecture Notes in Nanoscale Science and Technology ((LNNST,volume 5))

Abstract

The production of self-organized surface nanopatterns by ion beam sputtering (IBS) at low (<10 keV) and intermediate (10–100 keV) energies has emerged in the last decade as a promising bottom-up nanostructuring tool. The technique is remarkably universal, being applicable to metals, semiconductors or insulators, and it enables large degree of control over the main pattern features with high throughput (it requires low process time and can be used over extended areas). However, there is a wide scatter in the experimental results obtained as a function of system type and process parameters. In parallel, diverse theoretical models have been developed that differ in their capabilities to reproduce such a wide range of experimental features. We provide an overview of the most recent studies on the production of nanoripple, nanohole and nanodot periodic nanostructures by IBS, with special attention to the comparison between experiments and (continuum) models, and with a focus on those issues that remain open or, at least, ambiguous. The pattern properties to be considered are those of potential increased technological importance, such as the variation of size, shape, distance and ordering of the nanostructures as a function of parameters such as ion energy, target temperature and sputtering time (i.e., fluence). Finally, reported and proposed applications of IBS nanopatterns are briefly presented showing, in this way, the high-potential functionality of IBS nanostructured surfaces.

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References

  1. Alkemade PFA, Jiang ZX (2001) Complex roughening of Si under oblique bombardment by low-energy oxygen ions. J Vac Sci Technol 19: 1699–1705

    CAS  Google Scholar 

  2. Alkemade PFA (2006) Propulsion of ripples on glass by ion bombardment. Phys Rev Lett 96: 107602

    CAS  Google Scholar 

  3. Amirtharaj PM, Little J, Wood GL, Wickenden A, Smith DD (2002) The army pushes the boundary of sensor performance through nanotechnology. In Grethlein CE (ed) The AMPTIAC Newsletter, Spring 2002, Special Issue: Nanotechnology 6: 49–56

    Google Scholar 

  4. Andersen HH, Bay HL (1981) Sputtering by particle bombardment vol I Chapter 4: R. Behrisch (Ed.). Springer, Berlin, pp 145–218

    Google Scholar 

  5. Auger MA, Schilardi PL, Caretti I, Sánchez O, Benítez G, Albella JM, Gago R, Fonticelli M, Vázquez L, Salvarezza RC, Azzaroni O (2005) Molding and Replication of Ceramic Surfaces with Nanoscale Resolution. Small 1: 300–309

    CAS  Google Scholar 

  6. Aste T, Valbusa U (2004) Surface instabilities in granular matter and ionsputtered surfaces. Physica A 332: 548–558

    Google Scholar 

  7. Aste T, Valbusa U (2005) Ripples and ripples: from sandy deserts to ionsputtered surfaces. New J Phys 7: 122

    Google Scholar 

  8. Azzaroni O, Schilardi PL, Salvarezza RC, Gago R, Vázquez L (2003) Direct molding of nanopatterned polymeric films: Resolution and errors. Appl Phys Lett 82: 457–459

    CAS  Google Scholar 

  9. Azzaroni O, Fonticelli MH, Benítez G, Schilardi PL, Gago R, Caretti I, Váquez L, Salvarezza RC (2004) Direct nanopatterning of metal surfaces using self-assembled molecular films. Adv Mater 16: 405–409

    CAS  Google Scholar 

  10. Azzaroni O, Fonticelli M, Schilardi PL, Benítez G, Caretti I, Albella JM, Gago R, Vázquez L, Salvarezza RC (2004) Surface nanopatterning of metal thin films by physical vapour deposition onto surface-modified silicon nanodots. Nanotechnol 15: S197-S200

    CAS  Google Scholar 

  11. Binnig G, Quate C, Gerber Ch (1986) Atomic force microscope. Phys Rev Lett 56: 930–933

    Google Scholar 

  12. Bobek T, Facsko S, Kurz H, Xu M, Teichert C (2003) Temporal evolution of dot patterns during ion sputtering. Phys Rev B 68: 085324

    Google Scholar 

  13. Bradley RM, Harper JME (1988) Theory of ripple topography induced by ion-bombardment. J Vac Sci Technol A 6: 2390–2395

    CAS  Google Scholar 

  14. Bradley RM (1996) Dynamic scaling of ion-sputtered rotating surfaces. Phys Rev E 54: 6149–6152

    CAS  Google Scholar 

  15. Bringa EM, Johnson RE, Papaléo RM (2002) Crater formation by single ions in the electronic stopping regime: Comparison of molecular dynamics simulations with experiments on organic films. Phys Rev. B 65: 094113

    Google Scholar 

  16. Brown AD, Erlebacher J (2005) Temperature and fluence effects on the evolution of regular surface morphologies on ion-sputtered Si(111). Phys Rev B 72: 075350

    Google Scholar 

  17. Brown AD, Erlebacher J (2005) Transient topographies of ion patterned Si(111). Phys Rev Lett 95: 056101

    Google Scholar 

  18. Calleja M, Anguita J, García R, Birkelund K, Pérez-Murano F, Dagata JA (1999) Nanometer-scale oxidation of silicon surfaces by dynamic force microscopy: Reproducibility, kinetics and nanofabrication. Nanotechnol 10: 10044–10050

    Google Scholar 

  19. Carter G, Vishnyakov V (1996) Roughening and ripple instabilities on ion-bombarded Si. Phys Rev B 54: 17647–17653

    CAS  Google Scholar 

  20. Carter G (1999) The effects of surface ripples on sputtering erosion rates and secondary ion emission yields. J Appl Phys 85: 455–459

    CAS  Google Scholar 

  21. Carter G (2001) The physics and applications of ion beam erosion. J Phys D Appl Phys 34: R1-R22

    CAS  Google Scholar 

  22. Carter G (2004) Proposals for producing novel periodic structures by ion bombardment sputtering. Vacuum 77: 97–100

    CAS  Google Scholar 

  23. Carter G (2005) Surface ripple amplification and attenuation by sputtering with diametrically opposed ion fluxes. Vacuum 79: 106–109

    CAS  Google Scholar 

  24. Carter G (2006) Proposals for producing novel periodic structures on silicon by ion bombardment sputtering. Vacuum 81: 138–140

    CAS  Google Scholar 

  25. Castro M, Cuerno R, Vázquez L, Gago R (2005) Self-organized ordering of nanostructures produced by ion-beam sputtering. Phys Rev Lett 94: 016102

    Google Scholar 

  26. Castro M, Cuerno R (2005) Comment on “Kinetic roughening of ion-sputtered Pd(001) surface: beyond the Kuramoto-Sivashinsky model”. Phys Rev Lett 94: 139601

    Google Scholar 

  27. Castro M, Muñoz-García J, Cuerno R, García-Hernández M, Vázquez L (2007) Generic equations for pattern formation in evolving interfaces. New J Phys 9: 102

    Google Scholar 

  28. Chason E, Mayer TM, Kellerman BK, McIlroy DT, Howard AJ (1994) Roughening instability and evolution of the Ge(001) surface during ion sputtering. Phys Rev Lett 72: 3040–3043

    CAS  Google Scholar 

  29. Chason E, Kellerman BK (1997) Monte Carlo simulations of ion-enhanced island coarsening. Nucl Instrum Methods Phys Res B 127: 225–229

    Google Scholar 

  30. Chason E, Erlebacher J, Aziz MJ, Floro JA, Sinclair MB (2001) Dynamics of pattern formation during low-energy ion bombardment of Si(001). Nucl Instr and Meth B 178: 55–61

    CAS  Google Scholar 

  31. Chason E, Chan WL (2006) Kinetic mechanisms in ion-induced ripple formation on Cu(001) surfaces. Nucl. Instrum. Methods Phys Res B 242: 232–236

    CAS  Google Scholar 

  32. Chason E, Chan WL, Bharathi MS (2006) Kinetic Monte Carlo simulations of ion-induced ripple formation: Dependence on flux, temperature, and defect concentration in the linear regime. Phys Rev B 74: 224103

    Google Scholar 

  33. Chen YJ, Wilson IH, Cheung WY, Xu JB, Wong SP (1997) Ion implanted nanostructures on Ge(111) surfaces observed by atomic force microscopy. J Vac Sci Technol B 15: 809–813

    CAS  Google Scholar 

  34. Chen YJ, Wang JP, Soo EW, Wu L, Chong TC (2002) Periodic magnetic nanostructures on self-assembled surfaces by ion beam bombardment. J Appl Phys 91: 7323–7184

    CAS  Google Scholar 

  35. Chen HH, Orquidez OA, Ichim S, Rodriguez LH, Brenner MP, Aziz MJ (2005) Shocks in ion sputtering sharpen steep surface features. Science 310: 294–297

    CAS  Google Scholar 

  36. Chen Y, Chen H, Yu J, Williams JS, Craig V (2007) Focused ion beam milling as a universal template technique for patterned growth of carbon nanotubes. Appl Phys Lett 90: 093126

    Google Scholar 

  37. Chey SJ, Van Nostrand JE, Cahill DG (1995) Surface morphology of Ge(001) during etching by low-energy ions. Phys Rev B 52: 16696–166701

    CAS  Google Scholar 

  38. Chini TK, Sanyal MK, Bhattacharyya SR (2002) Energy-dependent wavelength of the ion-induced nanoscale ripple. Phys Rev B 66: 153404

    Google Scholar 

  39. Chini TK, Okuyama F, Tanemura M, Nordlund K (2003) Structural investigation of keV Ar-ion-induced surface ripples in Si by cross-sectional transmission electron microscopy. Phys Rev B 67: 205403

    Google Scholar 

  40. Cirlin E-H, Vajo JJ, Doty RE, Hasenberg TC (1991) Ion-induced topography, depth resolution, and ion yield during secondary ion mass spectrometry depth profiling of GaAs/AlGaAs superlattice: effects of sample rotation. J Vac Sci Technol A 9: 1395

    CAS  Google Scholar 

  41. Costantini G, de Mongeot FB, Boragno C, Valbusa U (2001) Is ion sputtering always a “negative homoepitaxial deposition”?. Phys Rev Lett 86: 838–841

    CAS  Google Scholar 

  42. Csahók Z, Misbah C, Rioual F, Valance A (2000) Dynamics of aeolian sand ripples. Eur Phys J E 3: 71–86

    Google Scholar 

  43. Cuenat A, Aziz MJ (2002) Spontaneous pattern formation from focused and unfocused ion beam irradiation. Mat Res Soc Symp Proc 696: N2.8.1–N.2.8.6

    Google Scholar 

  44. Cuerno R, Barabási AL (1995) Dynamic scaling of ion-sputtered surfaces. Phys Rev Lett 74: 4746–4749

    CAS  Google Scholar 

  45. Cuerno R, Makse HA, Tomassone S, Harrington ST, Stanley HE (1995) Stochastic model for surface erosion via ion sputtering: dynamical evolution from ripple morphology to rough morphology. Phys Rev Lett 75: 4464–4467

    CAS  Google Scholar 

  46. Cuerno R, Castro M, Muñoz-García J, Gago R, Vázquez L (2007) Universal non-equilibrium phenomena at submicrometric surfaces and interfaces. Eur Phys J Special Topics 146: 427

    Google Scholar 

  47. Datta A, Wu YR, Wang YL (2001) Real-time observation of ripple structure formation on a diamond surface under focused ion-beam bombardment. Phys Rev B 63: 125407

    Google Scholar 

  48. Datta D, Bhattacharyya SR, Chini TK, Sanyal MK (2002) Evolution of surface morphology of ion sputtered GaAs(100). Nucl Instr and Meth B 193: 596–602

    CAS  Google Scholar 

  49. Datta DP, Chini TK (2004) Atomic force microscopy study of 60-keV Ar-ion-induced ripple patterns on Si(100). Phys Rev B 69: 235313

    Google Scholar 

  50. Datta DP, Chini TK (2005) Spatial distribution of Ar on the Ar-ion-induced rippled surface of Si. Phys Rev B 71: 235308

    Google Scholar 

  51. Demanet CV, Malherbe JB, van der Berg NG, Sankar V (1995) Atomic force microscopy investigation of argon-bombarded InP: Effect of ion dose density. Surf Interface Anal 23: 433–439

    CAS  Google Scholar 

  52. Diaz de la Rubia T, Averback RS, Benedeck R, King WE (1987) Role of thermal spikes in energetic displacement cascades. Phys Rev Lett 59: 1930–1933

    Google Scholar 

  53. Erlebacher J, Aziz MJ, Chason E, Sinclair MB, Floro JA (1999) Spontaneous pattern formation on ion bombarded Si(001). Phys Rev Lett 82: 2330–2333

    CAS  Google Scholar 

  54. Ehrlich G, Hudda FG (1966) Atomic view of surface self-diffusion: Tungsten on tungsten. J Chem Phys 44: 1039–1049

    CAS  Google Scholar 

  55. Facsko S, Dekorsy T, Koerdt C, Trappe C, Kurz H, Vogt A, Hartnagel HL (1999) Formation of ordered nanoscale semiconductor dots by ion sputtering. Science 285: 1551–1553

    CAS  Google Scholar 

  56. Facsko S, Dekorsy T, Trappe C, Kurz H (2000) Self-organized quantum dot formation by ion sputtering. Microelectron Eng 53: 245–248

    CAS  Google Scholar 

  57. Facsko S, Kurz H, Dekorsy T (2001) Energy dependence of quantum dot formation by ion sputtering. Phys Rev B 63: 165329

    Google Scholar 

  58. Facsko S, Bobek T, Kurz H, Dekorsy T, Kyrsta S, Cremer R (2001) Ion-induced formation of regular nanostructures on amorphous GaSb surfaces. Appl Phys Lett 80: 130–132

    Google Scholar 

  59. Facsko S, Bobek T, Stahl A, Kurz H, Dekorsy T (2004) Dissipative continuum model for self-organized pattern formation during ion-beam erosion. Phys Rev B 69: 153412

    Google Scholar 

  60. Fan WB, Li WQ, Qi LJ, Sun HT, Luo J, Zhao YY, Lu M (2005) On the role of ion flux in nanostructuring by ion sputter erosion. Nanotechnol 16: 1526–1529

    CAS  Google Scholar 

  61. Feix M, Hartmann AK, Kree R, Muñoz-García J, Cuerno R (2005) Influence of collision cascade statistics on pattern formation of ion-sputtered surfaces. Phys Rev B 71: 125407

    Google Scholar 

  62. Finnine I (1995) Some reflections on the past and future of erosion. Wear 186–187: 1–10

    Google Scholar 

  63. Flamm D, Frost F, Hirsch D (2001) Evolution of surface topography of fused silica by ion beam sputtering. Appl Surf Sci 179: 95–101

    CAS  Google Scholar 

  64. Frost F, Schindler A, Bigl F (2000) Roughness evolution of ion sputtered rotating InP surfaces: Pattern formation and scaling laws. Phys Rev Lett 85: 4116–4119

    CAS  Google Scholar 

  65. Frost F, Hirsch D, Schindler A (2001) Evaluation of AFM tips using nanometer-sized structures induced by ion sputtering. Appl Surf Sci 179: 8–12

    CAS  Google Scholar 

  66. Frost F, Rauschenbach B (2003) Nanostructuring of solid surfaces by ion-beam erosion. Appl Phys A 77: 1–9

    CAS  Google Scholar 

  67. Frost F, Fechner R, Ziberi B, Flamm D, Schindler A (2004) Large area smoothing of optical surfaces by low-energy ion beams. Thin Sol Films 459: 100–1005.

    CAS  Google Scholar 

  68. Frost F, Ziberi B, Höche T, Rauschenbach B (2004) The shape and ordering of self-organized nanostructures by ion sputtering. Nucl Instr and Meth B 216: 9–19

    CAS  Google Scholar 

  69. Frost F, Fechner R, Flamm D, Ziberi B, Frank W, Schindler A (2004) Ion beam assisted smoothing of optical surfaces. Appl Phys A 78: 651–654

    CAS  Google Scholar 

  70. Gago R, Vázquez L, Cuerno R, Varela M, Ballesteros C, Albella JM (2001) Production of ordered silicon nanocrystals by low-energy ion sputtering. Appl Phys Lett 78: 3316–3318

    CAS  Google Scholar 

  71. Gago R, Vázquez L, Cuerno R, Varela M, Ballesteros C, Albella JM (2002) Nanopatterning of silicon surfaces by low-energy ion-beam sputtering: Dependence on the angle of ion incidence. Nanotechnol 13: 304–308

    CAS  Google Scholar 

  72. Gago R, Vázquez L, Plantevin O, Metzger TH, Muñoz-García J, Cuerno R, Castro M (2006) Order enhancement and coarsening of self-organized silicon nanodot patterns induced by ion-beam sputtering. Appl Phys Lett 89: 233101

    Google Scholar 

  73. Gago R, Vázquez L, Sánchez-García JA, Varela M Ballesteros MC, Plantevin O, Albella JM, Metzger TH (2006) Temperature influence on the production of nanodot patterns by ion beam sputtering of Si(001). Phys Rev B 73: 155414

    Google Scholar 

  74. Granone F, Mussi V, Toma A, Orlanducci S, Terranova ML, Boragno C, Buatier de Mongeot F, Valbusa U (2005) Ion sputtered surfaces as templates for carbon nanotubes alignment and deformation. Nucl Inst. and Meth B 230: 545–550

    CAS  Google Scholar 

  75. Grove WR (1852) On the electrochemical polarity of gases. Phil Trans R Soc (London) B 142: 87

    Google Scholar 

  76. Guo LJ (2007) Nanoimprint lithography: Methods and material requirements. Adv Mater 19: 495–513

    CAS  Google Scholar 

  77. Habenicht S, Bolse W, Lieb KP, Reimann K, Geyer U (1999) Nanometer ripple formation and self-affine roughening of ion-beam-eroded graphite surfaces. Phys Rev B 60: R2200–R2203

    CAS  Google Scholar 

  78. Habenicht S (2001) Morphology of graphite surfaces after ion-beam erosion. Phys Rev B 63: 125419

    Google Scholar 

  79. Habenicht S, Lieb KP, Koch J, Wieck AD (2002) Ripple propagation and velocity dispersion on ion-beam-eroded silicon surfaces. Phys Rev B 65: 115327

    Google Scholar 

  80. Harrison DE (1988) Application of molecular-dynamics simulations to the study of ion-bombarded metal-surfaces. Crit Rev Solid State Mater Sci 14: S1–S78.

    Google Scholar 

  81. Hartmann AK, Kree R, Geyer U, Kölbel M (2002) Long-time effects in a simulation model of sputter erosion. Phys Rev B 65: 193403

    Google Scholar 

  82. Hazra S, Chini TK, Sanyal MK, Grenzer J, Pietsch U (2004) Ripple structure of crystalline layers in ion-beam-induced Si wafers. Phys Rev B 70: 121307(R)

    Google Scholar 

  83. Hodes G (2007) When small is different: Some recent advances in concepts and applications of nanoscale phenomena. Adv Mater 19: 639–655

    CAS  Google Scholar 

  84. Hofer C, Abermann S, Teichert C, Bobek T, Kurz H, Lyutovich K, Kasper E (2004) Ion bombardment induced morphology modifications on self-organized semiconductor surfaces. Nucl Inst and Meth B 216: 178–184

    CAS  Google Scholar 

  85. Jeffries JH, Zuo JK, Craig MM (1996) Instability of kinetic roughening in sputter-deposition growth of Pt on glass. Phys Rev Lett 76: 4931–4934

    CAS  Google Scholar 

  86. Johnson LF, Ingersoll KA (1979) Interference gratings blazed by ion-beam erosion. Appl Phys Lett 35: 500–503

    CAS  Google Scholar 

  87. Kahng B, Jeong H, Barábasi AL (2001) Quantum dot and hole formation in sputter erosion. Appl Phys Lett 78: 805–807

    CAS  Google Scholar 

  88. Kardar M, Parisi G, Zhang YC (1986) Dynamic Scaling of growing interfaces. Phys Rev Lett 56: 889–892

    CAS  Google Scholar 

  89. Karen A, Okuno A, Soeda F, Ishitani I (1991) A study of the secondary-ion yield change on the GaAs surface caused by the \({\rm O}_2^+\) ion-beam-induced rippling. J Vac Sci Technol A 9: 2247–2252

    CAS  Google Scholar 

  90. Karmakar P, Ghose D (2004) Ion beam sputtering induced ripple formation in thin metal films. Surf Sci 554: L101–L106

    CAS  Google Scholar 

  91. Karmakar P, Goshe D (2005) Nanoscale periodic and faceted structures formation on Si(100) by oblique angle oxygen ion sputtering. Nucl Instr and Meth B 230: 539–544

    CAS  Google Scholar 

  92. Kasemo B (2002) Biological surface science. Surf Sci 500: 656–677

    CAS  Google Scholar 

  93. Kim J, Cahill DG, Averback RS (2003) Surface morphology of Ge(111) during etching by keV ions. Phys Rev B 67: 045404

    Google Scholar 

  94. Kim TC, Ghim C-M, Kim HJ, Kim DH, Noh DY, Kim ND, Chung JW, Yang JS, Chang YJ, Noh TW, Kahng B, Kim J-S (2004) Kinetic Roughening of Ion-Sputtered Pd(001) Surface: beyond the kuramoto-sivashinsky model. Phys Rev Lett 92: 246104

    CAS  Google Scholar 

  95. Kim TC, Ghim C-M, Kim HJ, Kim DH, Noh DY, Kim ND, Chung JW, Yang JS, Chang YJ, Noh TW, Kahng B, Kim J-S (2005) Kim et al. Reply. Phys Rev Lett 94: 139602

    Google Scholar 

  96. Koponen I, Hautala M, Sievänen O-P (1996) Simulations of submicrometer-scale roughening on ion-bombarded solid surfaces. Phys Rev B 54: 13502–13505

    CAS  Google Scholar 

  97. Koponen I, Hautala M, Sievänen O-P (1997) Simulations of roughening of amorphous carbon surfaces bombarded by low-energy Ar-ions. Nucl Instrum Methods Phys Res B 127–128: 230–234

    Google Scholar 

  98. Koponen I, Hautala M, Sievänen O-P (1997) Simulations of ripple formation on ion-bombarded solid surfaces. Phys Rev Lett 78: 2612–2615

    CAS  Google Scholar 

  99. Koponen I, Sievänen O-P, Hautala M, Hakovirta M (1997) Simulations of sputtering induced roughening and formation of surface topography in deposition of amorphous diamond films with mass separated kiloelectronvolt ion beams. J Appl Phys 82: 6047–6055

    CAS  Google Scholar 

  100. Koponen I, Hautala M, Sievänen O-P (1997) Simulations of self-affine roughening and ripple formation on ion bombarded amorphous carbon surfaces. Nucl Instrum Methods Phys Res B 129: 349–355

    CAS  Google Scholar 

  101. Krim J, Heyvaert I, Haesendonck CV, Bruynseraede Y (1993) Scanning tunnelling microscopy observation of self-affine fractal roughness in ion-bombarded film surfaces. Phys Rev Lett 70: 57–60

    CAS  Google Scholar 

  102. Krug J (2004) Kinetic pattern formation at solid surfaces. In: Radons G, Häussler P, Just W (eds) Collective dynamics of nonlinear and disordered systems. Springer, Berlin.

    Google Scholar 

  103. Kulriya PK, Tripathi A, Kabiraj D, Khan SA, Avasthi DA (2006) Study of 1.5 keV Ar atoms beam induced ripple formation on Si surface by atomic force microscopy. Nucl Instr and Meth B 244: 95–99

    CAS  Google Scholar 

  104. Kustner M, Eckstein W, Dose V, Roth J (1998) The influence of surface roughness on the angular dependence of the sputter yield. Nucl Instr and Meth B 145: 320–331

    CAS  Google Scholar 

  105. Lau GS, Tok ES, Liu R, Wee ATS, Tjiu WC, Zhang J (2003) Nanostructure formation by O2 + ion sputtering of Si/SiGe heterostructures. Nanotechnol 14: 1187–1191

    CAS  Google Scholar 

  106. Li YZ, Vázquez L, Piner R, Reifenberger R (1989) Writing nanometer-scale symbols in gold using the scanning tunneling microscope. Appl Phys Lett 54: 1424–1426

    Google Scholar 

  107. Lindner J, Poulopoulos P, Farle M, Baberschke K (2000) Structure and magnetism of self-organized Ni nanostructures on Cu(001). J Magn Magn Mater 218: 10–16

    CAS  Google Scholar 

  108. Liu ZX, Alkemade PFA (2001) Flux dependence of oxygen-beam- induced ripple growth on silicon. Appl Phys Lett 79: 4334–4336

    CAS  Google Scholar 

  109. Ludwig F Jr, Eddy CR Jr, Malis O, Headrick RL (2002) Si(100) surface morphology evolution during normal-incidence sputtering with 100–500 eV Ar+ ions. Appl Phys Lett 81: 2770–2772

    CAS  Google Scholar 

  110. Maclaren SW, Baker JE, Finnegan WL, Loxton CM (1992) Surface roughness development during sputtering of GaAs and InP: Evidence for the role of surface diffusion in ripple formation and sputter cone development. J Vac Sci Technol A 10: 468–476

    CAS  Google Scholar 

  111. Makeev MA, Barabási AL (1997) Ion-induced effective surface diffusion in ion sputtering. Appl Phys Lett 71: 2800–2802

    CAS  Google Scholar 

  112. Makeev MA, Cuerno R, Barábasi AL (2002) Morphology of ion-sputtered surfaces. Nucl Instr Meth B 97: 185–227

    Google Scholar 

  113. Malherbe JB (2003) Bombardment-induced ripple topography on GaAs and InP. Nucl Instr Meth B 212: 258–263

    CAS  Google Scholar 

  114. Mayer TM, Chason E, Howard AJ (1994) Roughening instability and ion-induced viscous relaxation of SiO2 surfaces. J Appl Phys 73: 1633–1643

    Google Scholar 

  115. Michely T, Comsa G (1991) Temperature dependence of the sputtering morphology of Pt(111). Surf Sci 256: 217–226

    CAS  Google Scholar 

  116. Mirkin CA (2001) Dip-pen nanolithography: automated fabrication of custom multicomponent, sub-100 nm nanometer surface architectures. MRS Bull 26: 535–538

    CAS  Google Scholar 

  117. Moore DF, Daniel JH, Walker JF (1997) Nano- and micro-technology applications of focused ion beam processing. Microelectron J 28: 465–473

    Google Scholar 

  118. Mora A, Haase M, Rabbow T, Plath PJ (2005) Discrete model for laser driven etching and microstructuring of metallic surfaces. Phys Rev B 72: 061604

    Google Scholar 

  119. Mori H, Kuramoto Y (1997) Dissipative structures and chaos. Springer, Berlin

    Google Scholar 

  120. Moroni R, Sekiba D, Buatier de Mongeot F, Gonella G, Boragno C, Mattera L, Valbusa U (2003) Uniaxial magnetic anisotropy in nanostructured Co/Cu(001): From surface ripples to nanowires. Phys Rev Lett 91: 167207

    CAS  Google Scholar 

  121. Mullins WW (1957) Theory of thermal grooving. J Appl Phys 28: 333

    CAS  Google Scholar 

  122. Mullins WW (1959) Flattening of a nearly plane solid surface due to capillarity J Appl Phys 30: 77

    Google Scholar 

  123. Muñoz-García J, Castro M, Cuerno R (2006) Nonlinear ripple dynamics on amorphous surfaces patterned by ion beam sputtering. Phys Rev Lett 96: 086101

    Google Scholar 

  124. Muñoz-García J, Cuerno R, Castro M (2006) Short-range stationary patterns and long-range disorder in an evolution equation for one-dimensional interfaces. Phys Rev E 74: 050103(R)

    Google Scholar 

  125. Muñoz-García J, Cuerno R, Castro M (2007) Coupling of morphology to surface transport in ion-beam irradiated surfaces: Oblique incidence. Phys Rev B 78: 205408

    Google Scholar 

  126. Muñoz-García J, Cuerno R, Castro M (2009) Coupling of morphology to surface transport in ion-beam irradiated surfaces: Normal incidence and rotating targets. J Phys: Condens Matter. In press

    Google Scholar 

  127. Murty MVR, Cowles B, Cooper BH (1998) Surface smoothing during sputtering: mobile vacancies versus adatom detachment and diffusion. Surf Sci 415: 328–335

    CAS  Google Scholar 

  128. Murty MVR (2002) Sputtering: The material erosion tool. Surf Sci 500: 523–544

    CAS  Google Scholar 

  129. Mussi V, Granonce F, Boragno C, Bautier de Mongeot, Valbusa (2006) Surface nanostructuring and optical activation of lithium fluoride crystals by ion beam irradiation. Appl Phys Lett 88: 103116

    Google Scholar 

  130. Nastasi MA, Mayer JW, Hirvonen JK (1996) Ion-solid interactions: Fundamentals and applications. Cambridge University Press, New York

    Google Scholar 

  131. Navez M, Chaperot D, Sella C (1962) Microscopie electronique – etude de l’attaque du verre par bombardement ionique. C R Acad Sci 254: 240–248

    CAS  Google Scholar 

  132. Nord J, Nordlund K, Keinonen J (2003) Molecular dynamics study of damage accumulation in GaN during ion beam irradiation. Phys Rev B 68: 184104

    Google Scholar 

  133. Oechsner H (1975) Sputtering - Review of some recent experimental and theoretical aspects. Appl Phys 8: 185–198

    CAS  Google Scholar 

  134. Oechsner H (ed.) (1984) Thin film and depth profile analysis. Springer, Berlin.

    Google Scholar 

  135. Okutani T, Shikate S, Ichimura S, Shimizu R (1980) Angular distribution of Si atoms sputtered by keV Ar+ ions. J Appl Phys 51: 2884–2887

    CAS  Google Scholar 

  136. Ozaydin G, Özcan AS, Wang Y, Ludwig KF, Zhou H, Headrick RL, Siddons DP (2005) Real-time x-ray studies of Mo-seeded Si nanodot formation during ion bombardment. Appl Phys Lett 87: 163104

    Google Scholar 

  137. Paniconi M, Elder KR (1997) Stationary, dynamical, and chaotic states of the two-dimensional damped Kuramoto-Sivashinsky equation. Phys. Rev. E 56: 2713–2721

    CAS  Google Scholar 

  138. Park S, Kahng B, Jeong H, Barabási AL (1999) Dynamics of ripple formation in sputter erosion: Nonlinear phenomena. Phys Rev Lett 83: 3486–3489

    CAS  Google Scholar 

  139. Plücker J (1958) Observations on the electrical discharge through rarefied gases. The London, Edimburgh and Dublin Phil Mag 16: 409

    Google Scholar 

  140. Politi P, Misbah C (2006) Nonlinear dynamics in one dimension: A criterion for coarsening and its temporal law. Phys Rev E 73: 036133

    Google Scholar 

  141. Raible M, Mayr SG, Linz SJ, Moske M, Hänggi P, Samwer K (2000) Amorphous thin-film growth: Theory compared with experiment. Europhys Lett 50: 61–67

    CAS  Google Scholar 

  142. Raible M, Linz SJ, Hänggi P (2001) Amorphous thin film growth: Effects of density inhomogeneities. Phys Rev E 64: 031506

    CAS  Google Scholar 

  143. Rossnagel SM, Robinson RS (1982) Surface diffusion activation energy determination using ion beam microtexturing. J Vac Sci Technol 20: 195–198

    CAS  Google Scholar 

  144. Rossnagel SM (2003) Thin film deposition with physical vapor deposition and related technologies. J Vac Sci Technol A 21: S74–S87

    Google Scholar 

  145. Rost M, Krug J (2005) Anisotropic Kuramoto-Sivashinsky equation for surface growth and erosion. Phys Rev Lett 75 : 3894–3897

    Google Scholar 

  146. Roth J (1983) Chemical sputtering. Topics Appl Phys 52: 91–146

    CAS  Google Scholar 

  147. Rusponi S, Boragno C, Valbusa U (1997) Ripple structure on Ag(110) surface induced by ion sputtering. Phys Rev Lett 78: 2795–2798

    CAS  Google Scholar 

  148. Rusponi S, Constantini G, Boragno C, Valbusa U (1998) Ripple wave vector rotation in anisotropic crystal sputtering. Phys Rev Lett 81: 2735–2738

    CAS  Google Scholar 

  149. Schildenberger M, Bonetti YC, Gobrecht J, Prins R (2000) Nano-pits: Supports for heterogeneous model catalysts prepared by interference lithograpy. Top Catal 13: 109–120

    CAS  Google Scholar 

  150. Schubert E, Razek N, Frost F, Schindler A, Rauschenbach B (2005) GaAs surface cleaning by low-energy hydrogen ion bombardment at moderate temperatures. J Appl Phys 97: 23511

    Google Scholar 

  151. Schwoebel RL, Shipsey EJ (1966) Step motion on crystal surfaces. J Appl Phys 37: 3682–3686

    CAS  Google Scholar 

  152. Seoo YS, Luo H, Samuilov VA, Rafailovic h MH, Sokolov J, Gersappe D, Chu B (2004) DNA Electrophoresis on Nanopatterned Surfaces. Nano Lett 4: 659–664

    Google Scholar 

  153. Shen J, Kischner J (2002) Tailoring magnetism in artificially structured materials: The new frontier. Surf Sci 500: 300–322

    CAS  Google Scholar 

  154. Sigmund P (1969) Theory of sputtering. I. Sputtering yield of amorphous and polycrystalline targets. Phys Rev 184: 383–416

    CAS  Google Scholar 

  155. Sigmund P (1973) A mechanism of surface micro-roughening by ion bombardment. J Mat Sci 8: 1545–1553

    CAS  Google Scholar 

  156. Soh HT, Guarini KW, Quate CF (2001) Scanning probe lithography. Kluwer, Boston.

    Google Scholar 

  157. Sohn LL, Willet RL (1995) Fabrication of nanostructures using atomic-force-microscope- based lithography. Appl Phys Lett 67: 1552–1554

    CAS  Google Scholar 

  158. Smirnov VK, Kibalov DS, Krivelevich SA, Lepshin PA, Potapov EV, Yankov RA, Skorupa W, Makarov VV, Danilin AB (1999) Wave-ordered structures formed on SOI wafers by reactive ion beams. Nucl Instr and Meth B 147: 310–315

    CAS  Google Scholar 

  159. Smirnov VK, Kibalov DS, Orlov OM, Graboshinikov VV (2003) Technology for nanoperiodic doping of a metal-oxide-semiconductor field-effect transistor channel using a self-forming wave-ordered structure. Nanotechnol 14: 709–715

    CAS  Google Scholar 

  160. Stangl J, Hol V, Bauer G (2004) Structural properties of self-organized semiconductor nanostructures. Rev Mod Phys 76: 725–783

    CAS  Google Scholar 

  161. Stark J (1908) Zeitsch Elecktrochem 14: 752–756

    Google Scholar 

  162. Stepanova M, Dew SK (2004) Surface relaxation in ion-etch nanopatterning. Appl Phys Lett 84: 1374–1376

    CAS  Google Scholar 

  163. Stepanova M, Dew SK, Soshnikov IP (2005) Copper nanopattern on \({\rm SiO}_2\) from sputter etching a \({\rm Cu}/{\rm SiO}_2\) interface. Appl Phys Lett 86: 073112

    Google Scholar 

  164. Stepanova M, Dew SK (2006) Self-organized Cu nanowires on glass and Si substrates from suptter etching Cu/substrate interfaces. J Vac Sci Technol B 24: 592–598

    CAS  Google Scholar 

  165. Strobel M, Heinig K-H, Michely T (2001) Mechanisms of pit coarsening in ion erosion of fcc(111) surfaces: a kinetic 3D lattice Monte-Carlo study. Surf Sci 486: 136–156

    CAS  Google Scholar 

  166. Stuart RV, Wehner GK, Anderson GS (1969) Energy distribution of atoms sputtered from polycrystalline metals. J Appl Phys 40: 803–812

    CAS  Google Scholar 

  167. Tachi S, Okudaira S (1986) Chemical sputtering of silicon by F+, Cl+, and Br+ ions - reactive spot model for reactive ion etching. J Vac Sci Technol B 4: 459–467

    CAS  Google Scholar 

  168. Taglauer E (1990) Surface cleaing using sputtering. Appl Phys A 51: 238–251

    Google Scholar 

  169. Tan SK, Liu R, Sow CH, Wee ATS (2006) Self-organized nanodot formation on InP(100) by oxygen ion sputtering. Nucl Instr and Meth B 248: 83–89

    CAS  Google Scholar 

  170. Tan SK, Wee ATS (2006) Self-organized nanodot formation on InP(100) by argon ion sputtering at normal incidence. J Vac Sci Technol B 24: 1444–1448

    CAS  Google Scholar 

  171. Teichert C (2001) Self-organization of nanostructures in semiconductor heteroepitaxy. Phys Rep 365: 335–432

    Google Scholar 

  172. Teichert C (2003) Self-organized semiconductor surfaces as templates for nanostructured magnetic thin films. Appl Phys A 76: 653–664

    CAS  Google Scholar 

  173. Terris BD, Thomson T (2005) Nanofabrication and self-assembled magnetic structures as data storage media. J Phys D: Appl Phys 38: R199-R222

    CAS  Google Scholar 

  174. Tok ES, Ong SW, Kang HC (2004) Dynamical scaling of sputter-roughened surfaces in 2+1 dimensions. Phys Rev E 70: 011604

    CAS  Google Scholar 

  175. Toma A, Buatier de Mongeot F, Buzio R, Firpo G, Bhattacharyya SR, Boragno C, Valbusa U (2005) Ion beam erosion of amorphous materials: Evolution of surface morphology. Nucl Instr and Meth B 230: 551–554

    CAS  Google Scholar 

  176. Umbach CC, Headrick RL, Chang K (2001) Spontaneous nanoscale corrugation of ion-eroded \({\rm SiO}_2\): The role of ion-irradiation-enhanced viscous flow. Phys Rev Lett 87: 246104

    CAS  Google Scholar 

  177. Vajo JJ, Doly RE, Cirlin EH (1996) Influence of O2 + energy, flux, and fluence on the formation and growth of sputtering-induced ripple topography on silicon. J Vac Sci Technol A 14: 2709–2720

    CAS  Google Scholar 

  178. Valbusa U, Boragno C, Buatier de Mongeot F (2002) Nanostructuring surfaces by ion sputtering. J Phys: Condens Matter 14: 8153–8175

    Google Scholar 

  179. Vogel S, Linz SJ (2005) Continuum modeling of sputter erosion under normal incidence: Interplay between nonlocality and nonlinearity. Phys Rev B 72: 035416

    Google Scholar 

  180. Vogel S, Linz SJ (2006) How ripples turn into dots: Modeling ion-beam erosion under oblique incidence. Europhys Lett 76: 884–890

    CAS  Google Scholar 

  181. Wei S, Li B, Fujimoto T, Kojima I (1998) Surface morphological modification of Pt thin films induced by growth temperature. Phys. Rev. B 58: 3605–3608

    CAS  Google Scholar 

  182. Witcomb MJ (1974) Prediction of apex angel of surface cones on ion-bombarded crystalline materials. J Mat Sci 9: 1227–1232

    CAS  Google Scholar 

  183. Wittmaack K (1984) An attempt to understand the sputtering yield enhancement due to implantation of inert-gases in amorphous solids. Nucl Instr and Meth B 230: 569–572

    CAS  Google Scholar 

  184. Wittmaack K (1999) Effect of surface roughening on secondary ion yields and erosion rates of silicon subject to oblique oxygen bombardment. J Vac Sci Technol A 8: 2246–2250

    Google Scholar 

  185. Xia YN, McClelland JJ, Gupta R, Qin D, Zhao XM, Sohn LL, Celotta RJ, Whitesides GM (1997) Replica molding using polymeric materials: A practical step toward nanomanufacturing. Adv Mater 9: 147–149

    CAS  Google Scholar 

  186. Xu M, Teichert C (2004) How do nanoislands induced by ion sputtering evolve during the early stage of growth? J Appl Phys 96: 2244–2248

    CAS  Google Scholar 

  187. Yonzon CR, Stuart DA, Zhang X, McFarland AD, Haynes CL, Van Duyne RP (2005) Towards advanced chemical and biological nanosensors? An overview. Talanta 67: 438–448

    CAS  Google Scholar 

  188. Yewande EO, Kree R, Hartmann AK (2005) Propagation of ripples in Monte Carlo models of sputter-induced surface morphology. Phys Rev B 71: 195405

    Google Scholar 

  189. Yewande EO, Hartmann AK, Kree R (2006) Morphological regions and oblique-incidence dot formation in a model of surface sputtering. Phys Rev B 73: 115434

    Google Scholar 

  190. Zaera F (2002) The surface chemistry of catalysis: New challenges ahead. Surf Sci 500: 947–965

    CAS  Google Scholar 

  191. Zalm PC (1986) Ion beam assisted etching of semiconductors. Vacuum 36: 787–797

    CAS  Google Scholar 

  192. Zalm PC (1994) Secondary ion mass spectrometry. Vacuum 45: 753–772

    CAS  Google Scholar 

  193. Zhao Y, Drotar JT, Wang GC, Lu TM (1999) Roughening in Plasma Etch Fronts of Si(100). Phys Rev Lett 82: 4882–4885

    CAS  Google Scholar 

  194. Zhao Y, Wang GC, Lu TM (2001) Characterization of amorphous and crystalline rough surface: Principles and applications. In Celotta R, Lucatorto T (eds.) Experimental methods in the physical sciences vol. 3. Academic Press, San Diego.

    Google Scholar 

  195. Ziberi B, Frost F, Tartz M, Neumann H, Rauschenbach (2004) Importance of ion beam parameters on self-organized pattern formation on semiconductor surfaces by ion beam erosion. Thin Sol Films 459: 106–110

    CAS  Google Scholar 

  196. Ziberi B, Frost F, Höche T, Rauschenbach B (2005) Ripple pattern formation on silicon surfaces by low-energy ion-beam erosion: Experiment and theory. Phys Rev B 72: 235310

    Google Scholar 

  197. Ziberi B, Frost F, Rauschenbach B, Höche T (2005) Highly ordered self-organized dot patterns on Si surfaces by low-energy ion-beam erosion. Appl Phys Lett 87: 033113

    Google Scholar 

  198. Ziberi B, Frost F, Rauschenbach B (2006) Pattern transitions on Ge surfaces during low-energy ion beam erosion. Appl Phys Lett 88: 173115

    Google Scholar 

  199. Ziberi B, Frost F, Rauschenbach B (2006) Formation of large-area nanostructures on Si and Ge surfaces during low energy ion beam erosion. J Vac Sci Technol A 24: 1344–1348

    CAS  Google Scholar 

  200. Ziberi B, Frost F, Rauschenbach B (2006) Self-organized dot patterns on Si surfaces during noble gas ion beam erosion. Surf Sci 600: 3757–3761

    CAS  Google Scholar 

  201. Ziegler JF, Biersack JP, Littmark U (1985) The stopping and range of ions in matter. Pergamon, New York.

    Google Scholar 

  202. Ziegler ZF (1999) IBM Research, SRIM-2006.01 (PC version), Yorktown Heights, New York. [http://www.srim.org]

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Acknowledgments

We are pleased to acknowledge collaborations and exchange with a number of colleagues, in particular JM Albella, MC Ballesteros, A-L Barabási, M Camero, T Chini, M Feix, AK Hartmann, R Kree, M Makeev, TH Metzger, O Plantevin, M Varela and EO Yewande. We would like to thank specially F Alonso for his help in the ripple experiments on Si at 40 keV shown in Section 3.

Our work has been partially supported by Spanish grants Nos. FIS2006-12253-C06 (-01, -02, -03, -06) from Ministerio de Educación y Ciencia (MEC), CCG06-UAM/MAT-0040 from Comunidad Autónoma de Madrid (CAM) and Universidad Autónoma de Madrid, CCG08-CSIC/MAT-3457 from CAM and CSIC, UC3M-FI-05-007 and CCG06-UC3M/ESP-0668 from CAM and Universidad Carlos III de Madrid, and finally S-0505/ESP-0158 from CAM. RG also acknowledges financial support from the “Ramón y Cajal” program (MEC).

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  1. Departamento de Matemáticas and Grupo Interdisciplinar de Sistemas, Complejos (GISC), Universidad Carlos III de Madrid, E-28911 Leganés, Spain

    Javier Muñoz-García & Rodolfo Cuerno

  2. Consejo Superior de Investigaciones Científicas, Instituto de Ciencia de Materiales de Madrid, E-28049 Madrid, Spain

    Luis Vázquez, José A. Sánchez-García & Raúl Gago

  3. Universidad Pontificia Comillas de Madrid, Escuela Técnica Superior de Ingeniería and GISC, E-28015 Madrid, Spain

    Mario Castro

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  1. Dept. Physics, University of Arkansas, W. Dickson St. 835, Fayetteville, 72701, U.S.A.

    Zhiming M. Wang

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Muñoz-García, J., Vázquez, L., Cuerno, R., Sánchez-García, J.A., Castro, M., Gago, R. (2009). Self-Organized Surface Nanopatterning by Ion Beam Sputtering. In: Wang, Z. (eds) Toward Functional Nanomaterials. Lecture Notes in Nanoscale Science and Technology, vol 5. Springer, New York, NY. https://doi.org/10.1007/978-0-387-77717-7_10

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