Datum
2021-04-18Metadata
Zur Langanzeige
Aufsatz
Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces
Zusammenfassung
This research work is targeting to demonstrate that micromirror arrays can also be fabricated successfully on flexible substrates—not only on glass substrates. The paper reports on the technological data of a successful process on a flexible substrate for curvilinear surfaces. Polyethylene naphthalate substrate was selected for its low cost, strong resistance against chemicals which are used in fabrication process and sufficient optical transmission for the visible and near infrared spectrum. Finally, electrostatic actuation of the fabricated micromirror structures is proven experimentally.
Zitierform
In: Optical and Quantum Electronics Volume 53 / Issue 5 (2021-04-18) eissn:1572-817XFörderhinweis
Gefördert im Rahmen des Projekts DEALZitieren
@article{doi:10.17170/kobra-202104273752,
author={Amirzada, Muhammad Rizwan and Li, Qingdang and Hillmer, Hartmut},
title={Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces},
journal={Optical and Quantum Electronics},
year={2021}
}
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2021-05-11T11:24:14Z 2021-05-11T11:24:14Z 2021-04-18 doi:10.17170/kobra-202104273752 http://hdl.handle.net/123456789/12816 Gefördert im Rahmen des Projekts DEAL eng Namensnennung 4.0 International http://creativecommons.org/licenses/by/4.0/ optical MEMS micromirros flexible substrate polyethylene naphthalate 530 Development of optical MEMS-based micromirror arrays on flexible substrate for curvilinear surfaces Aufsatz This research work is targeting to demonstrate that micromirror arrays can also be fabricated successfully on flexible substrates—not only on glass substrates. The paper reports on the technological data of a successful process on a flexible substrate for curvilinear surfaces. Polyethylene naphthalate substrate was selected for its low cost, strong resistance against chemicals which are used in fabrication process and sufficient optical transmission for the visible and near infrared spectrum. Finally, electrostatic actuation of the fabricated micromirror structures is proven experimentally. open access Amirzada, Muhammad Rizwan Li, Qingdang Hillmer, Hartmut doi:10.1007/s11082-021-02846-7 MEMS Mikrooptik Spiegelsystem Substrat <Mikroelektronik> Thermoplast publishedVersion eissn:1572-817X Issue 5 Optical and Quantum Electronics Volume 53 false 210
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