[D-7-2] Ultra Thin Body Silicon-On-Insulator (UTB SOI) MOSFET with Metal Gate Work-function Engineering for sub-70 nm Technology Node
Daewon Ha, Pushkar Ranade, Yang-Kyu Choi, Jeong-Soo Lee, Tsu-Jae King, Chenming Hu
(1.University of California at Berkeley, Department of Electrical Engineering and Computer Science)
https://doi.org/10.7567/SSDM.2002.D-7-2
