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Growth of (111) One-Axis-Oriented Bi(Mg1/2Ti1/2)O3 Films on (100)Si Substrates

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Published 21 March 2013 Copyright (c) 2013 The Japan Society of Applied Physics
, , Citation Takahiro Oikawa et al 2013 Jpn. J. Appl. Phys. 52 04CH09 DOI 10.7567/JJAP.52.04CH09

1347-4065/52/4S/04CH09

Abstract

Films of a high-pressure perovskite phase, Bi(Mg1/2Ti1/2)O3, were prepared on (111)c-oriented SuRuO3-coated (111)Pt/TiO2/SiO2/(100)Si substrates. The perovskite Bi(Mg1/2Ti1/2)O3 films had a (111) one-axis orientation, because their constituent grains were epitaxially grown on (111)c-oriented perovskite SrRuO3 ones. The remanent polarization and piezoelectric constant measured at an applied electric field of 600 kV/cm were about 30 µC/cm2 and 40 pm/V, respectively. A remarkable phase transition was not observed from room temperature to 350 °C in a (111) one-axis-oriented Bi(Mg1/2Ti1/2)O3 film, suggesting that the Curie temperature of this film is above 350 °C.

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10.7567/JJAP.52.04CH09