Published December 1, 2017 | Version v1
Project deliverable Open

A set of typical relevant exposure scenarios for nanoparticles in semiconductor industry

  • 1. IMEC
  • 2. NXP
  • 3. Intel

Description

This deliverable identifies typical exposure scenarios in the semiconductor industry. The objective of Task 1.3 in WP1 is to identify typical exposure scenarios out of the material trajectories from material delivery to waste disposal from Task 1.2 which in turn is based on the list of nanomaterials identified in the Task 1.1. The task concerns both exposure scenarios for trajectories of nanomaterials purchased for use within semiconductor manufacturing plants as well as occurrences of potential nanomaterial generation within semiconductor facilities.

Files

Nanostreem WP1_Task_1_3_deliverable_13_1012017_public.pdf

Files (247.5 kB)

Additional details

Funding

NanoStreeM – NANOmaterials: STRategies for Safety Assessments in advanced Integrated Circuits Manufacturing 688194
European Commission