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Manufacturing of Multifunctional Nanocrystalline ZnO Thin Films

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Abstract:

Optical, surface and structural properties of ZnO thin films fabricated by reactive radio- frequency (rf) magnetron sputtering and sol-gel coating methods are comparatively investigated. The optical properties of films produced by both techniques have very similar characteristics, however; the surface morphology and degree of crystallinity have different behaviors. The nanostructure columnar zinc oxide thin films can be synthesized by sol-gel coating methods which can have numerous applications requiring larger surface area. Also, the process scalability and large-scale manufacturing of these materials are discussed. It indicated that the nanostructure ZnO thin films can be synthesized with sol-gel methods at wafer levels with nano-grains and improved surface properties compared with reactive rf magnetron sputtering deposition.

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Info:

Periodical:

Advanced Materials Research (Volumes 383-390)

Pages:

4073-4078

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.383-390.4073

Citation:

Cite this paper

Online since:

November 2011

Authors:

Ahalapitiya H. Jayatissa, A.M. Soleimanpour, Yue Hao

Keywords:

Electrical Properties, Microstructure, Optical Property, RF Magnetron Sputtering, Sol-Gel Coating, Thin Film, Zinc Oxide (ZnO)

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