A Charge Storage Based Enhancement Mode AlGaN/GaN High Electron Mobility Transistor

Article Preview

Abstract:

In this work, a charge storage based enhancement mode (E-mode) AlGaN/GaN high electron mobility transistor (HEMT) is proposed and studied. A stacked gate dielectrics, consisting of a tunnel oxide, a charge trap layer and a blocking oxide are applied in the HEMT structure. The E-mode can be realized by negative charge storage within the charge trap layer during the programming process. The impact of the programming condition and the thickness of the dielectrics on the threshold voltage (Vth) are simulated systematically. It is found that the Vth increases with the increasing programming voltage and time due to the increase of the storage charge. Under proper programming condition, the Vth can be increased to more than 2 V. Moreover, It is also found that the Vth increases with the decrease of the thickness of the dielectrics. In addition, it is found that the breakdown voltage of such HEMT can be adjusted by varying the gate dielectric stacks.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

870-875

Citation:

Online since:

February 2018

Export:

Price:

* - Corresponding Author

[1] K.J. Chen, C. Zhou, Enhancement‐mode AlGaN/GaN HEMT and MIS‐HEMT technology, Phys. Stat. Soli. (a). 208 (2011) 434-438.

DOI: 10.1002/pssa.201000631

Google Scholar

[2] Y. Cai, Y. Zhou, K.M. Lau, K.J. Chen, Control of threshold voltage of AlGaN/GaN HEMTs by fluoride-based plasma treatment: from depletion mode to enhancement mode, IEEE Trans. Elec. Dev. 53 (2006) 2207-2215.

DOI: 10.1109/ted.2006.881054

Google Scholar

[3] W. Lanford, T. Tanaka, Y. Otoki, I. Adesida, Recessed-gate enhancement-mode GaN HEMT with high threshold voltage, Elec. Lett. 41 (2005) 449-450.

DOI: 10.1049/el:20050161

Google Scholar

[4] O. Hilt, F. Brunner, E. Cho, A. Knauer, E. Bahat-Treidel, J. Würfl. Normally-off high-voltage p-GaN gate GaN HFET with carbon-doped buffer, in IEEE 23rd International Symposium on Power Semiconductor Devices and ICs (ISPSD). 2011. IEEE.

DOI: 10.1109/ispsd.2011.5890835

Google Scholar

[5] B. Lee, C. Kirkpatrick, X. Yang, S. Jayanti, R. Suri, J. Roberts, V. Misra. Normally-off AlGaN/GaN-on-Si MOSHFETs with TaN floating gates and ALD SiO2 tunnel dielectrics, in 2010 IEEE International Electron Devices Meeting (IEDM). 2010. IEEE.

DOI: 10.1109/iedm.2010.5703401

Google Scholar

[6] C. Kirkpatrick, B. Lee, Y. Choi, A. Huang, V. Misra, Threshold voltage stability comparison in AlGaN/GaN FLASH MOS‐HFETs utilizing charge trap or floating gate charge storage, Phys. Stat. Soli. (c). 9 (2012) 864-867.

DOI: 10.1002/pssc.201100421

Google Scholar

[7] H. Wang, N. Wang, L. -L. Jiang, X. -P. Lin, H. -Y. Zhao, H. -Y. Yu, A novel enhancement mode AlGaN/GaN high electron mobility transistor with split floating gates, Chin. Phys. B. 26 (2017) 047305.

DOI: 10.1088/1674-1056/26/4/047305

Google Scholar

[8] Y.N. Tan, W.K. Chim, W.K. Choi, M.S. Joo, B.J. Cho, Hafnium aluminum oxide as charge storage and blocking-oxide layers in SONOS-type nonvolatile memory for high-speed operation, IEEE Trans. Elec. Dev. 53 (2006) 654-662.

DOI: 10.1109/ted.2006.870273

Google Scholar

[9] J. Bu, M.H. White, Design considerations in scaled SONOS nonvolatile memory devices, Soli. Stat. Elec. 45 (2001) 113-120.

DOI: 10.1016/s0038-1101(00)00232-x

Google Scholar

[10] Y. Wang, M.H. White, An analytical retention model for SONOS nonvolatile memory devices in the excess electron state, Soli. Stat. Elec. 49 (2005) 97-107.

DOI: 10.1016/j.sse.2004.06.009

Google Scholar

[11] M. Ťapajna, J. Kuzmík, A comprehensive analytical model for threshold voltage calculation in GaN based metal-oxide-semiconductor high-electron-mobility transistors, Appl. Phys. Lett. 100 (2012) 113509.

DOI: 10.1063/1.3694768

Google Scholar

[12] F. Chen, M. Shinosky, B. Li, J. Gambino, S. Mongeon, P. Pokrinchak, J. Aitken, D. Badami, M. Angyal, R. Achanta. Critical ultra low-k TDDB reliability issues for advanced CMOS technologies, in Reliability Physics Symposium, 2009 IEEE International. 2009. IEEE.

DOI: 10.1109/irps.2009.5173298

Google Scholar

[13] F. Monsieur, E. Vincent, D. Roy, S. Bruyere, J. Vildeuil, G. Pananakakis, G. Ghibaudo. A thorough investigation of progressive breakdown in ultra-thin oxides. Physical understanding and application for industrial reliability assessment, in 40th Annual Reliability Physics Symposium Proceedings. 2002. IEEE.

DOI: 10.1109/relphy.2002.996609

Google Scholar