Amorphous Silicon Carbide as a Non-Biofouling Structural Material for Biomedical Microdevices

Christian A. Zorman; Abigail Eldridge; Jian Gang Du; Matt Johnston; Anna Dubnisheva; Sargum Manley; William Fissell; Aaron Fleischman; Shuvo Roy

doi:10.4028/www.scientific.net/MSF.717-720.537

Paper Titles

Stress Evaluation on Hetero-Epitaxial 3C-SiC Film on (100) Si Substrates
p.521

Micro-Raman Analysis of a Micromachined 3C-SiC Cantilever
p.525

Single-Crystal SiC Resonators by Photoelectrochemical Etching
p.529

Amorphous Silicon Carbide (α-SiC) Thin Square Membranes for Resonant Micromechanical Devices
p.533

Amorphous Silicon Carbide as a Non-Biofouling Structural Material for Biomedical Microdevices
p.537

Seebeck Coefficient of Heavily Doped Polycrystalline 3C-SiC Deposited by LPCVD
p.541

OBIC Measurements on Avalanche Diodes in 4H-SiC for the Determination of Impact Ionization Coefficients
p.545

Radiation Hardness of Wide-Bandgap Materials as Exemplified by SiC Nuclear Radiation Detectors
p.549

Terahertz Electroluminescence of 6H-SiC Natural SiC Superlattice in Bloch Oscillations Regime
p.553

HomeMaterials Science ForumMaterials Science Forum Vols. 717-720Amorphous Silicon Carbide as a Non-Biofouling...

Amorphous Silicon Carbide as a Non-Biofouling Structural Material for Biomedical Microdevices

Abstract:

This paper details the development of amorphous hydrogenated silicon carbide (a-SiC:H) films as structural material that is resistant to biofouling. The a-SiC:H films were deposited by PECVD and evaluated for their mechanical and anti-biofouling properties. It was found that the as-deposited films exhibited compressive residual stresses that could be converted to moderate tensile stresses upon a post deposition anneal. The amorphous films exhibited a much lower Young’s modulus but similar burst stress when compared to polycrystalline 3C-SiC films of like thickness. The as-deposited a-SiC:H films were more resistant to biofouling than silicon and silicon dioxide surfaces. Coating the a-SiC:H films with polyethylene glycol (PEG) significantly improved the anti-fouling characteristics for extended periods.