Design and Fabrication of Low-Power Planar Type Gas Sensor

Zi Li Zhang; Chen Bo Yin; Chun Min Tao; Bin Zhu

doi:10.4028/www.scientific.net/MSF.694.580

Paper Titles

Temperature Induced Morphology Transformation of ZnO under Hydrothermal Condition
p.559

Synthesis and Characterization of Functional Cholesteryl Substituted Luminol Derivative
p.565

A Timesaving Solution Route for Hollow Polymer Microspheres by Alkali Neutralization Method
p.570

Synthesis and Properties of Fe₃O₄ Ferrofluids with Narrow Particle Size Distribution
p.575

Design and Fabrication of Low-Power Planar Type Gas Sensor
p.580

The Effect of Multi-Step Anodic Oxidation
p.585

The Thermal Stress between the Interfaces of Different Materials of the Axis Symmetric Structural
p.591

Polyimide Electronic Structural and Optical Properties from First Principles Calculations
p.597

Preparation of Visible-Light Responsive Photocatalyst S_xTi_1-XO₂
p.602

HomeMaterials Science ForumMaterials Science Forum Vol. 694Design and Fabrication of Low-Power Planar Type...

Design and Fabrication of Low-Power Planar Type Gas Sensor

Abstract:

In this paper we describe the fabrication steps and the implementation of a planar type gas sensing applications with suspended structure, which presents very low power consumption. Simulations with the finite element model tool show homogeneous temperature distribution across the sensitive film. The device attached with a spin-coated thin layer of SnO2 showed a reasonable sensing performance to hydrogen.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Materials Science Forum (Volume 694)

Pages:

580-584

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.694.580

Citation:

Cite this paper

Online since:

July 2011

Authors:

Zi Li Zhang, Chen Bo Yin, Chun Min Tao, Bin Zhu

Keywords:

Gas Sensor, Planar Type, Power Consumption, Suspended Structure, Temperature Distribution

Export:

RIS, BibTeX

Price:

Permissions:

Request Permissions

References

[1] T. Maekawa, K. Suzuki, T. Takada, T. Kobayashi and M. Egashira: Sens. Actuat. B Vol. 80 (2001), pp.51-58

Google Scholar

[2] J. Wang, P. Zhang, J. Q. Qi and P. J. Yao: Sens. Actuat. B Vol. 136 (2009), pp.399-404.

Google Scholar

[3] S. Shukla, P. Zhang, H. J. Cho and L. Ludwing: Int. J. Hydrogen Energy. Vol. 33 (2008), pp.470-495.

Google Scholar

[4] C. M. Tao, C. B. Yin, M. X. He and S. D. Tu, in: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS, (2008), pp.284-287.

Google Scholar