Formation Mechanism of Stacking Faults in PVT 4H-SiC Created by Deflection of Threading Dislocations with Burgers Vector c+a

Michael Dudley; Huan Huan Wang; Fang Zhen Wu; Sha Yan Byrapa; Balaji Raghothamachar; Gloria Choi; Edward Sanchez; Darren M. Hansen; Roman Drachev; Stephan G. Mueller; Mark J. Loboda

doi:10.4028/www.scientific.net/MSF.679-680.269

Paper Titles

Electrically Active Defects in Electron Irradiated P-Type 6H-SiC
p.253

Large-Scale Electronic Structure Calculations of Vacancies in 4H-SiC Using the Heyd-Scuseria-Ernzerhof Screened Hybrid Density Functional
p.261

Formation Mechanism of Stacking Faults in PVT 4H-SiC Created by Deflection of Threading Dislocations with Burgers Vector c+a
p.269

Electrical Activity of Structural Defects in 3C-SiC
p.273

Efficient Image Segmentation for Detection of Dislocations in High Resolution Light Microscope Images of SiC Wafers
p.277

Propagation of Stacking Faults in 3C-SiC
p.282

Etch Pits on 4H-SiC Surface Produced by ClF₃ Gas
p.286

HomeMaterials Science ForumMaterials Science Forum Vols. 679-680Formation Mechanism of Stacking Faults in PVT...

Formation Mechanism of Stacking Faults in PVT 4H-SiC Created by Deflection of Threading Dislocations with Burgers Vector c+a

Abstract:

Synchrotron White Beam X-ray Topography studies are presented of dislocation behavior and interactions in a new generation of seventy-six millimeter diameter, 4H-SiC wafers grown using Physical Vapor Transport under specially designed low stress conditions. Such low stress growth conditions have enabled reductions of dislocation density by two or three orders of magnitude compared to the lowest previously reported levels [1]. In this paper, detailed topography analysis will be presented of the deflection of threading dislocations with Burgers vectors of c and c+a onto the basal plane leading to reductions of the density of such dislocations down to levels of ~187 cm-2. The deflection of the latter type of dislocations produces complex faulted defect configurations and models for their creation are presented and discussed.

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Periodical:

Materials Science Forum (Volumes 679-680)

Pages:

269-272

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.679-680.269

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Online since:

March 2011

Authors:

Michael Dudley, Huan Huan Wang, Fang Zhen Wu, Sha Yan Byrapa, Balaji Raghothamachar, Gloria Choi, Edward Sanchez, Darren M. Hansen, Roman Drachev, Stephan G. Mueller, Mark J. Loboda

Keywords:

Burgers Vector c+a, Macrostep, Overgrowth, Shockley Partial, Synchrotron White-Beam X-Ray Topography (SWBXT), Threading Dislocation

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