Precision Polishing of Micro Mold by Using Piezoelectric Actuator Incorporated with Mechanical Amplitude Magnified Mechanism

Sze Keat Chee; Hirofumi Suzuki; Mutsumi Okada; Takeshi Yano; Toshiro Higuchi; Wei Min Lin

doi:10.4028/www.scientific.net/AMR.325.470

Paper Titles

Drilling of Borosilicate Glass with Feedback Control Based on Cutting Force
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An Investigation on the Chemical Effect in Chemo-Mechanical Polishing
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Research on the Polishing Performance of CMP Slurry for the Sapphire Crystal
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Tribological Aspects of Chemical Mechanical Polishing Diamond Surfaces
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Precision Polishing of Micro Mold by Using Piezoelectric Actuator Incorporated with Mechanical Amplitude Magnified Mechanism
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Investigation of a Polishing Pad and a Carrier Film for Decreasing Edge Roll Off of Workpiece
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Buffing Performance Analysis of Viscoelastic Polymer with Sensor-Less Polishing Pressure Control
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Verification of Polishing Phenomena of Nickel Cylinder Using Photocatalyst and Luminous Dye Excited by Ultraviolet Ray -Study of Ultraviolet-Ray Aided Machining-
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Studies on the Lapping of Polycrystalline Diamond Compact (PDC)
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 325Precision Polishing of Micro Mold by Using...

Precision Polishing of Micro Mold by Using Piezoelectric Actuator Incorporated with Mechanical Amplitude Magnified Mechanism

Abstract:

Demands of precision molds with complicated microstructures for digital devices such as DVD pick-up system, medical devices such as μ-TAS and solar optics etc. are increasing [1 - 5]. The structured molds must be polished after grinding or cutting in order to improve the surface roughness. In this paper, a two dimensional low frequency vibration (2DLFV) polishing actuator using PZT is proposed and developed. The 2DLFV consists of 4 mechanical amplitude magnified actuators (MechaTrans), a multilayer stacked piezoelectric actuator (PZT) incorporated with mechanical transformer, and a center piece. Mechanical transformer is a kind of flexure hinges structured that magnifies the stroke of the multilayer stacked piezoelectric actuator around 7 times to 120 μm. With this actuation, the tool vibrates in a circle trajectory to achieve polishing effect. In the polishing experiments, tungsten carbide molds (workpieces) are polished with diamond slurry. The surface roughness of the work pieces and polishing efficiency are evaluated. From the experimental results, it was found that low frequency vibration especially 2DLFV is a useful polishing system for micro structured mold.

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Periodical:

Advanced Materials Research (Volume 325)

Pages:

470-475

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.325.470

Citation:

Cite this paper

Online since:

August 2011

Authors:

Sze Keat Chee, Hirofumi Suzuki, Mutsumi Okada, Takeshi Yano, Toshiro Higuchi, Wei Min Lin

Keywords:

Mechanical Amplitude Magnified Mechanism, Micro Mold, Micro Polishing, Piezoelectric Actuator, Vibration Assisted Polishing

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References

[1] Chen, W., Kuriyagawa, T., Huang, H., Yosihara,N., 2005, Machining of micro aspherical mould inserts, Precision Engineering, 29/3, 315-323.

DOI: 10.1016/j.precisioneng.2004.11.002

Google Scholar

[2] Suzuki, H., Kodera, S., Nakasuji, T., Ohta, T., Syoji, K., 1998, Precision Grinding of Aspherical CVD-SiC Molding Die, International Journal of the Japan Society for Precision Engineering, 32/1, 25-30.

Google Scholar

[3] Suzuki, H., Muramatsu, A., Ymamoto, Y., Okino, T., Moriwaki, T., 2005, Precision Molding of Micro Aspherical Glass Lenses, Proceedings of 5th euspen International Conference, Montpellier, 1/2, 41-44.

Google Scholar

[4] Komanduri, R., Lucca, D.A., Tani, Y., 1997, Technological Advances in Fine Abrasive Process, Annals of the CIRP, 46/2, 545-596.

DOI: 10.1016/s0007-8506(07)60880-4

Google Scholar

[5] Brinksmeier, E. Riemer, O., Gessenharter, A., Autschbach, L., 2004, Polishing of Structured Molds, Annals of the CIRP, 53/1, 247-250.

DOI: 10.1016/s0007-8506(07)60690-8

Google Scholar

[6] Suzuki, H., Moriwaki, T., Okino, T., Ando, Y., 2006, Development of Ultrasonic Vibration Assisted Polishing Machine for Micro Aspheric Die and Mold, Annals of the CIRP, 55/1, 385-388.

DOI: 10.1016/s0007-8506(07)60441-7

Google Scholar

[7] Suzuki, H., Hamada, S., Okino, T., Kondo, M., Yamagata, Y., Higuchi, T., 2010, Ultraprecision finishing of micro-aspheric surface by ultrasonic two-axis vibration assisted polishing, Annals of the CIRP, 59/1, 347-350.

DOI: 10.1016/j.cirp.2010.03.117

Google Scholar