The Structure Research of Micromachined Airflow Omnibearing Level Posture Sensor

Lin Hua Piao; Yan Jie Li; Bai Hua Li; Ming Ming Ji; Xue Yan Zhang

doi:10.4028/www.scientific.net/AMR.108-111.1055

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 108-111The Structure Research of Micromachined Airflow...

The Structure Research of Micromachined Airflow Omnibearing Level Posture Sensor

Abstract:

The paper firstly introduced the sensitive mechanism of micromachined airflow omnibearing level posture, and compare several sense organ’s structure schematic design, and the best structure design is proposed. At last, it is testified that the design of micromachined airflow omnibearing level postrue sensor achieved the following performances: resolution<0.1°,the scope of azimuth is 360°,the scope of tile angle is 20°. The sensor is not only in small size but also in simply crafting. It is good in sensitive organ’s output consistency, and suitable for mass production.

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Info:

Periodical:

Advanced Materials Research (Volumes 108-111)

Pages:

1055-1060

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.108-111.1055

Citation:

Cite this paper

Online since:

May 2010

Authors:

Lin Hua Piao, Yan Jie Li, Bai Hua Li, Ming Ming Ji, Xue Yan Zhang

Keywords:

High-Precision Omnibearing, Level Posture, Micro Machined, Structure

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