Simulation and Analysis of the Temperature-Compensated FBAR

Bin Zhou; Yang Gao; Yi He; Wan Jing He

doi:10.4028/www.scientific.net/AMM.719-720.490

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 719-720Simulation and Analysis of the...

Simulation and Analysis of the Temperature-Compensated FBAR

Abstract:

The property of temperature-frequency drift has an effect on the passband ripples, center frequency and insertion loss of FBAR filters, reducing the reliability of its electrical application. A temperature-frequency drift simulation of a typical Mo/AlN/Mo FBAR is achieved by means of finite element analysis software ANSYS, the simulated temperature coefficient of frequency is about-35ppm/°C within the temperature range of-50°C~150°C. By adding a compensated layer with positive temperature coefficient in the FBAR structure, the effects of the compensated layer thickness on temperature-frequency drift, resonant frequency and electromechanical coupling are analyzed. The simulated temperature coefficient of frequency of designed temperature compensated FBAR, which composed of Mo/AlN/SiO₂/Mo, is about 0.8ppm/°C, the property of temperature-frequency drift is effectively improved.

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Periodical:

Applied Mechanics and Materials (Volumes 719-720)

Pages:

490-495

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.719-720.490

Citation:

Cite this paper

Online since:

January 2015

Authors:

Bin Zhou, Yang Gao*, Yi He, Wan Jing He

Keywords:

ANSYS, FBAR, Temperature Coefficient of Frequency, Temperature-Frequency Drift

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* - Corresponding Author

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