Distribution & Access For Publication Downloads News About Us Contact Us
Paper Titles
Effect of PE-g-MAH as Compatibilizer on Properties of LDPE/NR/WHF Composites
p.87
Effect of Strain Rates on the Mechanical Behavior of Cu Thin Films of Various Thicknesses
p.94
Effects of Carbon Co-Implantation on Transient Enhanced Diffusion and Performances of the Phosphorus Doped Ultra-Shallow Junction Nano NMOSFET
p.98
Effects of Cooling Rate on the Microstructure and Mechanical Properties of Ti-6Al-4V Alloy
p.103
Effects of Substrate Temperature on the Microstructure and Properties of Al-Doped ZnO Thin Films by DC Magnetron Sputtering from AZOY® Target
p.108
Engineered Properties of Sustainable Cement-Based Composites Containing Recycled Rock Wool and Supplementary Cementitious Materials
p.113
Fabrication and Characterization of Cu-Plated Fine Pitch Patterns on Flexible Polyimide
p.118
Fatigue Strength under Optimal Conditions of Spot Weldment Using GA and FEM
p.123
FEM Simulation on Rotating Piercing Process with Coulomb Friction
p.127

Effects of Substrate Temperature on the Microstructure and Properties of Al-Doped ZnO Thin Films by DC Magnetron Sputtering from AZOY® Target

Article Preview

Abstract:

Transparent conducting Al-doped ZnO (AZO) thin films were deposited on soda-lime glass substrates by DC magnetron sputtering with a sintered ceramic target, AZOY® that contains a small amount of Y2O3 in addition to Al2O3 and ZnO. The effect of substrate temperatures (Ts) on the structural, electrical and optical properties of the prepared AZO films was evaluated extensively. By elevating Ts, the electrical conductivity of the films could be effectively improved from 1.68 ×10-3 cm (no substrates heating) to a minimum resistivity of 4.6210-4 cm at Ts = 400oC with an average visible transmittance (400~800nm) of ~80%. It revealed that substrate heating is closely related to the crystallinity and the surface roughness of the deposited films. It is noteworthy that the transmittance in the NIR region was also improved considerably as compared to those using alloy targets by reactive magnetron sputtering and even slightly higher than those using Al-doped ZnO (1 wt.%) ceramic targets by RF sputtering.

You might also be interested in these eBooks
Innovation for Applied Science and Technology View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volumes 284-287)

Pages:

108-112

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.284-287.108

Citation:

Cite this paper

Online since:

January 2013

Authors:

Pin Chuan Yao, Shih Tse Hang, Menq Jiun Wu

Keywords:

Al-Doped ZnO, AZOY® Target, DC Magnetron Sputtering, Hydrogen, Optical Property

Export:

RIS, BibTeX

Price:

Permissions:

Request Permissions

References

[1] P.J. Kelly, R.D. Arnell, Vacuum 56 (2000), 159-172.

Google Scholar

[2] T. Minami, Thin Solid Films 516 (2008) 5822-5828.

Google Scholar

[3] K. Ellmer, A. Klein, B. Rech, Transparent Conductive Zinc Oxide, first ed., Springer, New York, (2007).

Google Scholar

[4] T. Minami, H. Sato, H Nanto, S. Takata, Thin Solid Films 176 (1989) 277-282.

Google Scholar

[5] T. Minami, H. Sato, H. Nanto, S. Takata, Jpn. J. Appl. Phys. 24 (1985) L781-L784.

Google Scholar

[6] B. Szyszka, Thin Solid Films 351 (1999) 164-169.

Google Scholar

[7] R. Kaur, A.V. Singh, R.M. Mehra, J. Non-Cryst. Solids 352 (2006) 2335-2338.

Google Scholar

[8] F. Ruske, V. Sittinger, W. Werner, B. Szyszka, K. -U. Osten, K. Dietrich, R. Rix, Surf. Coat. Technol. 200 (2005) 236-240.

DOI: 10.1016/j.surfcoat.2005.01.019

Google Scholar

[9] T. Minami, T. Yamamoto, T. Miyata, Thin Solid Films 366 (2000) 63-68.

Google Scholar

[10] P.C. Yao, S.T. Hang, M.J. Wu, and W.T. Shiao, Thin Solid Films 520 (2012) 2846-2854.

Google Scholar

[11] T. Minami, H. Sato, T. Sonoda, H. Nanto, S. Takata, Thin Solid Films 171 (1989) 307-311.

DOI: 10.1016/0040-6090(89)90637-8

Google Scholar

[12] O. Kluth, G. Schope, J. Hupkes, C. Agashe, J. Muller, B. Rech, Thin Solid Films 442 (2003) 80-85.

Google Scholar

[13] J.F. Chang, M.H. Hon, Thin Solid Films 386 (2001) 79-86.

Google Scholar

[14] M. Chen, Z.L. Pei, X. Wang, C. Sun, L.S. Wen, J. Vac. Sci. Technol. A 19 (2001) 963-970.

Google Scholar

[15] J.F. Chang, C.C. Shen, M.H. Hon, Ceramics International 29 (2003) 245-250.

Google Scholar

[16] J.H. Jou, M.Y. Han, D.J. Cheng, J. Appl. Phys. 71 (1992) 4333-4336.

Google Scholar

[17] K.C. Park, D.Y. Ma, K.H. Kim, Thin Solid Films 305 (1997) 201-209.

Google Scholar

[18] T.L. Tansley, D.F. Neely, Thin Solid Films 121 (1984) 95-107.

Google Scholar

[19] S.S. Lin, J.L. Huang, P. Sajgalik, Surf. Coat. Technol. 190 (2005) 39-47.

Google Scholar

[20] E. Fortunato A., Goncalves, V. Assuncao, A. Marques, H. Aguas, L. Pereira, I. Ferreira, R. Martins, Thin Solid Films 442 (2003) 121-126.

Google Scholar

[21] C. Oliveira, L. Rebouta, T. de Lacerda-Arôso, S. Lanceros-Mendez, T. Viseu, C.J. Tavares, J. Tovar, S. Ferdov, E. Alves, Thin Solid Films 517 (2009) 6290-6293.

DOI: 10.1016/j.tsf.2009.02.069

Google Scholar

[22] Z.L. Pei, C. Sun, M.H. Tan, J.Q. Xiao, D.H. Guan, R.F. Huang, L.S. Wen, J. Appl. Phys. 90 (2001) 3432-3436.

Google Scholar

[23] W. Beyer, J. Hüpkes, H. Stiebig, Thin Solid Films 516 (2007) 147-154.

DOI: 10.1016/j.tsf.2007.08.110

Google Scholar

Scientific.Net is a registered brand of Trans Tech Publications Ltd
© 2024 by Trans Tech Publications Ltd. All Rights Reserved