Preparation of Silicon Nan Spheres by Using Electrical Discharge Machining Method

Wei Zhang; Wei Wang; Juan Hong; Zhi Wei Zhang; Zheng Xun Liu

doi:10.4028/www.scientific.net/AMM.130-134.980

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 130-134Preparation of Silicon Nan Spheres by Using...

Preparation of Silicon Nan Spheres by Using Electrical Discharge Machining Method

Abstract:

As one of the key technologies, preparation of silicon nanospheres is very important for developing the new types of silicon based solar cells. In this paper, with the establishment of a novel electrical discharge machining (EDM) system and the raw material of heavy doped mono-crystalline silicon (0.01Ω•cm), silicon nanospheres of which diameter are ranging from 25nm to 280nm have been successfully prepared by using EDM method. The micro surface topography and the elements composition are analyzed by the SEM and the EDS methods respectively. The formation mechanism of nanospheres has also been studied.

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Periodical:

Applied Mechanics and Materials (Volumes 130-134)

Pages:

980-983

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.130-134.980

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Online since:

October 2011

Authors:

Wei Zhang, Wei Wang, Juan Hong, Zhi Wei Zhang, Zheng Xun Liu

Keywords:

EDM, Silicon Nanospheres, Solar Cell

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References

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