Temperature Gradient Effect on SiC Epitaxy in Liquid Phase
p.233
p.233
Micropipe Healing in Liquid Phase Epitaxial Growth of SiC
p.237
p.237
Growth of CVD Thin Films and Thick LPE 3C SiC in a Specially Designed Reactor
p.241
p.241
Lateral Epitaxial Overgrowth and Pendeo Epitaxy of 3C-SiC on Si Substrates
p.245
p.245
Selective Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates Using Hexachlorodisilane and Propane
p.249
p.249
The APD Annihilation Mechanism of 3C-SiC Hetero-Epilayer on Si(001) Substrate
p.253
p.253
Improvement of 3C-SiC Surface Morphology on Si(100) by Adding HCl using Atmospheric CVD
p.257
p.257
Carbonization on (100) Silicon for Heteroepitaxial Growth of 3C-SiC
p.261
p.261
Growth of 3C-SiC/Si Multilayer Heterostructures by Supersonic Free Jets
p.265
p.265
Selective Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates Using Hexachlorodisilane and Propane
Abstract:
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Info:
Periodical:
Materials Science Forum (Volumes 338-342)
Pages:
249-252
Citation:
Online since:
May 2000
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