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HomeMaterials Science ForumMaterials Science Forum Vols. 321-324Investigation of SiGe/Si - Heterostructures with...

Investigation of SiGe/Si - Heterostructures with High Resolution X-Ray Diffraction Methods

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Periodical:

Materials Science Forum (Volumes 321-324)

Pages:

457-462

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.321-324.457

Citation:

Cite this paper

Online since:

January 2000

Authors:

K. Frohberg, B. Wehner, B. Trui, K. Wolf, P. Paufler, H. Kück

Keywords:

High Resolution X-Ray Diffraction (HR-XRD), Reciprocal Space Mapping (RSM), Relaxation in Strained Layers, SiGe/Si-Heteroepitaxial-Structures, X-Ray Reflectometry

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