余凌竹, 鲁建. 扫描电镜的基本原理及应用[J]. 实验科学与技术, 2019, 17(5): 85-93. DOI: 10.3969/j.issn.1672-4550.2019.05.019
引用本文: 余凌竹, 鲁建. 扫描电镜的基本原理及应用[J]. 实验科学与技术, 2019, 17(5): 85-93. DOI: 10.3969/j.issn.1672-4550.2019.05.019
YU Lingzhu, LU Jian. The Fundamental Principles and Applications of Scanning Electron Microscopy[J]. Experiment Science and Technology, 2019, 17(5): 85-93. DOI: 10.3969/j.issn.1672-4550.2019.05.019
Citation: YU Lingzhu, LU Jian. The Fundamental Principles and Applications of Scanning Electron Microscopy[J]. Experiment Science and Technology, 2019, 17(5): 85-93. DOI: 10.3969/j.issn.1672-4550.2019.05.019

扫描电镜的基本原理及应用

The Fundamental Principles and Applications of Scanning Electron Microscopy

  • 摘要: 扫描电镜主要用于样品微区形貌、结构及成分的观察和分析。扫描电镜具有高的分辨率、良好的景深以及简易的操作等优点,使其在材料学、物理学、化学、生物学、考古学、地矿学以及微电子工业等领域有广泛的应用。该文结合多年的扫描电镜测试经验介绍了扫描电镜的基本原理、构造、优势以及在实际中的应用,为扫描电镜的初学者及从业者全面了解和使用扫描电镜提供一定的帮助。

     

    Abstract: The scanning electron microscopy (SEM) is mainly used for the observation and analysis of morphology, structure, and composition of samples. The SEM possesses advantages in resolution, depth of field and ease of operation. It plays an important role and is widely used in materials, physics, chemistry, biology, geology, archaeology, microelectronics industry, etc. Based on our experience of operating the SEM, this paper introduces the fundamental principle, construction, advantages, and applications of the SEM, which is helpful for the SEM learner and operator to grasp and use the SEM.

     

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