Abstract
We demonstrate substrate electron-beam-induced current (s-EBIC) measurements of individual single-walled carbon nanotubes (SWNTs) by measuring the current collected by the substrate electrode, which penetrates through the insulating oxide layer. We found that s-EBIC provided better image contrast than ordinary secondary electron imaging methods for locating SWNTs that are in contact with metal electrodes. The s-EBIC has been measured for different acceleration voltages and probe currents. We found that s-EBIC did not depend critically on the acceleration voltage when the e-beam irradiated an insulating layer as compared to the case when it irradiated metal electrodes. Importantly, s-EBIC signals were increased by more than 10%, when the SWNT part was irradiated, and this makes s-EBIC imaging a very useful tool for locating individual SWNTs efficiently.
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Park, J.K., Ahn, Y.H. Electron beam induced current on carbon nanotubes measured through substrate electrodes. Journal of the Korean Physical Society 67, 1773–1777 (2015). https://doi.org/10.3938/jkps.67.1773
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DOI: https://doi.org/10.3938/jkps.67.1773