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Growth of nano-crystalline diamond on single-crystalline diamond by CVD method

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Abstract

Nanocrystalline (NC) diamond films are grown by chemical vapor deposition on various single crystal diamond faces. Under conditions of NC diamond growth, the growing filmmorphology is reduced to two planes: {100} and {111}. The {100} planes are smooth and homoepitaxial layerby-layer growth occurs on them, whereas the NC film formed by twin crystalliteswith sizes of several tens and hundreds nanometers grows on {111} planes. Nitrogen impurity sharply increases the diamond growth rate.

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Authors and Affiliations

  1. Prokhorov General Physics Institute, Russian Academy of Sciences, ul. Vavilova 38, Moscow, 119991, Russia

    E. E. Ashkinazi, V. S. Sedov, A. A. Khomich, A. V. Khomich & V. G. Ralchenko

  2. National Research Nuclear University “MEPhI”, Kashirskoe sh. 31, Moscow, 115409, Russia

    E. E. Ashkinazi, V. S. Sedov, A. A. Khomich, A. V. Khomich & V. G. Ralchenko

  3. Lebedev Physical Institute, Russian Academy of Sciences, Leninskii pr. 53, Moscow, 119991, Russia

    R. A. Khmelnitsky & A. V. Khomich

  4. Kotel’nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Fryazino Branch, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190, Russia

    R. A. Khmelnitsky & A. V. Khomich

  5. Troitsk Institute for Innovation and Fusion Research (GNTs RF TRINITI), ul. Pushkovykh 12, Troitsk, Moscow oblast, 142190, Russia

    R. A. Khmelnitsky

  6. Harbin Institute of Technology, Nan Gang District, West Dazhi Street, 92, Shenzhen, Harbin, 518055, P. R. China

    V. G. Ralchenko

Authors
  1. E. E. Ashkinazi
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  2. V. S. Sedov
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  3. R. A. Khmelnitsky
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  4. A. A. Khomich
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  5. A. V. Khomich
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  6. V. G. Ralchenko
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Corresponding author

Correspondence to R. A. Khmelnitsky.

Additional information

Original Russian Text © E.E. Ashkinazi, V.S. Sedov, R.A. Khmelnitsky, A.A. Khomich, A.V. Khomich, V.G. Ralchenko, 2016, published in Kratkie Soobshcheniya po Fizike, 2016, Vol. 43, No. 12, pp. 65–70.

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Ashkinazi, E.E., Sedov, V.S., Khmelnitsky, R.A. et al. Growth of nano-crystalline diamond on single-crystalline diamond by CVD method. Bull. Lebedev Phys. Inst. 43, 378–381 (2016). https://doi.org/10.3103/S1068335616120101

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  • DOI: https://doi.org/10.3103/S1068335616120101

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