Skip to main content
SpringerLink
Log in

Computer analysis of the AFM images of the nanopore system on the SiO2/Si structure surface, obtained by Zn ion implantation

  • Proceedings of the XVIII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Used in Solid-State Physics SEM-2013
  • Published:
Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

A computer study of morphological characteristics using AFM images of a self-organized surface nanopore system in the structure of SiO2/Si(100) is performed. The nanopore system is obtained via Zn ion doping with subsequent thermal annealing. AFM images of the nanopore system are studied using the STIMAN 3D software. A correct quantitative estimate is made of the morphology of this nanopore system using a number of parameters (equivalent diameter, area, total area, and shape coefficient). Estimating the morphology of the self-organized surface nanopore system in the structure of SiO2/Si(100) allows us to narrow the possible practical applications of the resulting system in opto- and nanoelectronics.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Baraton, M.I., Synthesis, Functionalization, and Surface Treatment of Nanoparticles, Los Angeles: Amer. Sci., 2002.

    Google Scholar 

  2. Umeda, N., Amekura, H., and Kishimoto, N., Vacuum, 2009, vol. 83, p. 645.

    Article  Google Scholar 

  3. Shen, Y.Y., Li, X., Wang, Z., et al., J. Cryst. Growth, 2009, vol. 311, p. 4605.

    Article  ADS  Google Scholar 

  4. Marstein, E.S., Gunnæs, A.E., Serincan, U., et al., Instr. Meth. Phys. Res. B, 2003, vol. 207, p. 424.

    Article  ADS  Google Scholar 

  5. Privezentsev, V.V., Chernykh, P.N., and Petrov, D.V., Solid State Phenom., 2011, vols. 178–179, p. 217.

    Article  Google Scholar 

  6. Giannuzzi, L.A. and Steven, F.A., Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice, Berlin: Springer Press, 2004.

    Google Scholar 

  7. Sokolov, V.N., Yurkovets, D.I., Razgulina, O.V., and Mel’nik, V.N., Bull. Russ. Acad. Sci. Phys., 2004, vol. 68, no. 9, p. 1491.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Faculty of Geology, Lomonosov Moscow State University, Moscow, 119998, Russia

    V. N. Sokolov & O. V. Razgulina

  2. Institute of Physics and Technology, Russian Academy of Sciences, Moscow, 117218, Russia

    V. V. Privesentsev

  3. Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Moscow, 119998, Russia

    D. V. Petrov

Authors
  1. V. N. Sokolov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. O. V. Razgulina
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. V. V. Privesentsev
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. D. V. Petrov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to V. V. Privesentsev.

Additional information

Original Russian Text © V.N. Sokolov, O.V. Razgulina, V.V. Privesentsev, D.V. Petrov, 2014, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2014, Vol. 78, No. 9, pp. 1098–1102.

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Sokolov, V.N., Razgulina, O.V., Privesentsev, V.V. et al. Computer analysis of the AFM images of the nanopore system on the SiO2/Si structure surface, obtained by Zn ion implantation. Bull. Russ. Acad. Sci. Phys. 78, 859–863 (2014). https://doi.org/10.3103/S1062873814090287

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.3103/S1062873814090287

Keywords

Search

Navigation