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Determination of the Parameters of the First Coating Layer Using Broadband Optical Monitoring of the Deposition Process

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Abstract

The accuracy of determining the parameters of the first layer of an optical coating is of crucial importance for the accuracy of monitoring the deposition process of an entire multilayer coating. In this paper we propose a nonlocal algorithm for analyzing optical monitoring data, which allows the use of a more accurate layer model. The possibilities of the new nonlocal algorithm are demonstrated based on the example of studying the parameters of the first coating layer made of niobium oxide, which has a high refractive index and is one of the main materials used for film coatings.

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Funding

The work was supported by the Russian Science Foundation (project no. 21-11-00011).

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Authors and Affiliations

  1. Faculty of Physics, Moscow State University, 119991, Moscow, Russia

    T. F. Isaev, Iu. S. Lagutin, A. A. Lagutina, D. V. Lukyanenko & A. G. Yagola

  2. Research Computing Center, Moscow State University, 119991, Moscow, Russia

    T. F. Isaev, Iu. S. Lagutin, A. A. Lagutina, D. V. Lukyanenko, A. V. Tikhonravov & A. G. Yagola

  3. Moscow Center of Fundamental and Applied Mathematics, 119234, Moscow, Russia

    Iu. S. Lagutin, A. A. Lagutina, D. V. Lukyanenko & A. V. Tikhonravov

  4. JSC ORPE Technologiya, 249031, Obninsk, Kaluga Region, Russia

    O. F. Prosovskiy

Authors
  1. T. F. Isaev
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  2. Iu. S. Lagutin
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  3. A. A. Lagutina
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  4. D. V. Lukyanenko
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  5. O. F. Prosovskiy
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  6. A. V. Tikhonravov
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  7. A. G. Yagola
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Corresponding author

Correspondence to A. A. Lagutina.

Additional information

Translated by V. Alekseev

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Isaev, T.F., Lagutin, I.S., Lagutina, A.A. et al. Determination of the Parameters of the First Coating Layer Using Broadband Optical Monitoring of the Deposition Process. Moscow Univ. Phys. 76, 356–362 (2021). https://doi.org/10.3103/S002713492105009X

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  • DOI: https://doi.org/10.3103/S002713492105009X

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