In this paper the factors controlling the performance of an electron beam pumped broadband diatomic raregas halide excimer laser are discussed. Particular attention is directed toward the blue/green in the XeF (C-A) laser centered at 485 nm, for which significantly improved performance has been obtained by selective tailoringof mixture kinetic processes. Maximum XeF (C-A) laser output energy densities in excess of 3 J/liter have beenachieved, corresponding to an intrinsic efficiency of approximately 2%.