Abstract
Devices fabricated from the wide bandgap semiconductor SiC have many advantages over those made from conventional semiconductors. Thus, performance characteristics of some 4H-SiC devices can be two orders of magnitude better than equivalent devices made from silicon. On the other hand, new and unexpected problems have emerged with the operation of some SiC devices that need to be understood and solved before further progress can be made in this area. One of the most intriguing problems has been the degradation of bipolar PiN diodes that have major advantages over unipolar Schottky barrier diodes at high blocking voltages. The electrical degradation of the PiN diodes refers to a drop in voltage under extended forward current operation. The degradation appears to be associated with the appearance of stacking faults (SFs) in the entire base region of the diode. In this paper, we discuss some puzzling aspects of stacking fault formation in such diodes. Electroluminescence as well as TEM has been used to investigate the degradation problem and, based on experimental results, the formation of stacking faults within the device, possible sources of partial dislocations responsible for the stacking faults, and the enhanced motion of dislocations under forward biasing are considered.
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References
W. Shockley, Forward to Silicon Carbide: A High Temperature Semiconductor (Oxford, 1960).
J. A. Cooper Jr. and A. Agarwal, Proceedings of the IEEE 90(6), 956–968 (2002).
P. G. Neudeck, R. S. Okojie, and L.-Y. Chen, Proceedings of the IEEE 90(6), 1065 (2002).
S.-H. Ryu, A. K. Agarwal, R. Singh, and J. Palmour, IEEE Electro Device Lett. 22, 124 (2001).
S. M. Sze, Semiconductor Devices: Physics and Technology, (John Wiley, New York, 1985).
H. Lendenmann, F. Dahlquist, N. Johansson, R. Söderholm, P. Å. Nilsson, J. P. Bergman, and P. Skytt, in Proc. 3rd European Conference on Silicon Carbide and Related Materials, ed. G. Pensl et al. (Materials Science Forum 353–356, Zürich, Switzerland, 2001), pp. 727–730.
J. P. Bergman, H. Lendenmann, P. Å. Nilsson, U. Lindefelt, and P. Skytt, in Proc. 3 rd European Conference on Silicon Carbide and Related Materials, ed. G. Pensl et al., (Materials Science Forum 353–356, Zürich, Switzerland, 2001), pp. 299–302.
S. Soloviev, D. Cherednichenko, Y. Gao, A. Grekov, Y. Ma, and T. S. Sudarshan, J. Appl. Phys. 95(8), (2004). In press.
S. G. Müller, J. J. Sumakeris, M. F. Brady, R. C. Glass, H. M. Hobgood, J. R. Jenny, R. Leonard, D. P. Malta, M. J. Paisley, A. R. Powell, V. F. Tsvetkov, S. T. Allen, M. K. Das, J. W. Palmour, and C. H. Carter Jr., Eur. Phys J. (2004). In press.
O. Kordina, J. P. Bergman, A. Henry, E. Janzén, S. Savage, J. Andre, L. P. Ramberg, U. Lindefelt, H.W., and K. Bergman, Appl. Phys. Lett. 67(11), 1561–1563 (1995).
N. V. Dyakonova, P. A. Ivanov, V. A. Kozlov, M. E. Lenvinshtein, J. W. Palmour, S. L. Rumyantsev, and R. Singh, in Proc. ICSCRM - 1999, edited by C. H. Carter Jr. et al., (Materials Science Forum 338–342, Zurich, Switzerland, 2000), pp. 1319–1322.
J. D. Weeks, J. C. Tully, and L. C. Kimerling, Phys. Rev. B 12(8), 3286–3292 (1975).
H. Sumi, Phys. Rev. B 29(8), 4616–4630 (1984).
K. Maeda and S. Takeuchi, in Dislocation in Solids, Vol. 10, edited by F. R. N. Nabarro and M. S. Duesbery (North-Holland Publishing Co., Amsterdam, 1996), p. 443–504.
A. O. Konstantinov and H. Bleichner, Appl. Phys. Lett. 71(25), 3700–3702 (1997).
A. Galeckas, J. Linnros, B. Breitholtz, and H. Bleichner, J. Appl. Phys. 90(2), 980 (2001).
R. E. Stahlbush, M. Fatemi, J. B. Fedison, S. D. Arthur, L. B. Rowland, and S. Wang, J. Electron. Mater. 31, 827 (2002).
J.-L. Demenet, M. H. Hong, and P. Pirouz, Scripta mater. 43(9), 865–870 (2000).
M. Zhang, H. M. Hobgood, J. L. Demenet, and P. Pirouz, J. Mater. Res. 18(5), 1087 (2003).
A. Galeckas, J. Linnros, and P. Pirouz, Appl. Phys. Lett. 81(5), 883–885 (2002).
L. C. Kimerling and D. V. Lang, in Lattice Defects in Semiconductors, (Inst. Phys. Conf. Ser. No. 23, London, 1975), p. 589.
H. Iwata, U. Lindefelt, S. Öberg, and P. R. Briddon, Phys. Rev. B 65(3), 033203–1 (2002).
M. S. Miao, S. Limpijumnong, and W. R. L. Lambrecht, Appl. Phys. Lett. 79, 4360 (2001).
J. Q. Liu, M. Skowronski, C. Hallin, R. Söderholm, and H. Lendenmann, Appl. Phys. Lett. 80(5), 749–751 (2002).
P. O. Persson, L. Hultman, H. Jacobson, J. P. Bergman, E. Janzén, J. M. Molina-Aldareguia, W. J. Clegg, and T. Tuomi, Appl. Phys. Lett. 80(25), 4852–4854 (2002).
M. E. Twigg, R. E. Stahlbush, M. Fatemi, S. D. Arthur, J. B. Fedison, J. B. Tucker, and S. Wang, Appl. Phys. Lett. 82(15), 2410–2412 (2003).
M. Zhang, H. Lendenmann, and P. Pirouz, Appl. Phys. Lett. 83(16), 3320–3322 (2003).
A. V. Samant, Ph.D. Thesis, Case Western Reserve University, 1999.
M. H. Hong, A. V. Samant, and P. Pirouz, Phil. Mag. A 80(4), 919–935 (2000).
P. Pirouz, J. L. Demenet, and M. H. Hong, Phil. Mag. A 81(5), 1207–1227 (2001).
P. Petroff and R. L. Hartman, Appl. Phys. Lett. 23(8), 469–471 (1973).
P. Petroff and R. L. Hartman, J. Appl. Phys. 45(9), 3899–3903 (1974).
D. V. Lang and L. C. Kimerling, Phys. Rev. Lett. 33(8), 489–492 (1974).
A. N. Pilyankevich and V. F. Britun, phys. stat. sol. (a) 82449–457 (1984).
K. Maeda, K. Suzuki, and M. Ichihara, Microsc. Microanal. Microstruct. 4, 211–220 (1993).
J. W. Yang, X. J. Ning, and P. Pirouz, “Dislocations in SiC and their Recombination-Enhanced Motion” in Japan-US Workshop on Functional Fronts in Advanced Ceramics, edited by K. Yanagida and R. Newnham (Ceramic Society of Japan, Tsukuba, Japan, 1994), p. 55–58.
P. Pirouz, M. Zhang, J.-L. Demenet, and H. M. Hobgood, J. Appl. Phys. 93(6), 3279 (2003).
M. Skowronski, J. Q. Liu, W. M. Vetter, M. Dudley, C. Hallin, and H. Lendenmann, J. Appl. Phys. 92(8), 4699–4704 (2002).
P. B. Hirsch, J. Microscopy 118(1), 3–12 (1980).
M. Heggie and R. Jones, Phil. Mag. B 48(4), 365–377 (1983).
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Pirouz, P., Zhang, M., Galeckas, A. et al. Microstructural Aspects and Mechanism of Degradation of 4H-SiC PiN Diodes under Forward Biasing. MRS Online Proceedings Library 815, 223–234 (2004). https://doi.org/10.1557/PROC-815-J6.1
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DOI: https://doi.org/10.1557/PROC-815-J6.1